Fabrication of an ultra-high quality MgF2 micro-resonator for a single soliton comb generation

Zhier Qu; Xianwen Liu; Cheng Zhang; Jin Wang; Yongtian Wang; Yijie Pan; Jifeng Qu

doi:10.1364/OE.478863

Fabrication of an ultra-high quality MgF₂ micro-resonator for a single soliton comb generation

Zhier Qu, Xianwen Liu, Cheng Zhang, Jin Wang, Yongtian Wang, Yijie Pan^*, Jifeng Qu

^*Corresponding author for this work

School of Optics and Photonics

Research output: Contribution to journal › Article › peer-review

6 Citations (Scopus)

Abstract

Crystalline micro-resonators are attractive for a wide range of applications due to their extremely high quality (Q) factor. In this paper, we develop a semi-automatic method for fabricating ultra-high Q-factor MgF₂ crystalline micro-resonators. By utilizing a force feedback sensor and corresponding control, we made a semi-automatic precision grind-and-polishing machine, and successfully fabricated trapezoid MgF₂ resonators with diameter of 9.5 mm and a root mean square surface roughness of 0.26 nm. The maximum difference of peaks and valleys is about 1.5 nm. The Q-factor was characterized to be 9.24 × 10⁹at 1550 nm by the cavity ring-down spectroscopy. A single soliton optical frequency comb was generated by pumping the microcavity with 150 mW optical power.

Original language	English
Pages (from-to)	3005-3016
Number of pages	12
Journal	Optics Express
Volume	31
Issue number	2
DOIs	https://doi.org/10.1364/OE.478863
Publication status	Published - 16 Jan 2023

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abstract = "Crystalline micro-resonators are attractive for a wide range of applications due to their extremely high quality (Q) factor. In this paper, we develop a semi-automatic method for fabricating ultra-high Q-factor MgF2 crystalline micro-resonators. By utilizing a force feedback sensor and corresponding control, we made a semi-automatic precision grind-and-polishing machine, and successfully fabricated trapezoid MgF2 resonators with diameter of 9.5 mm and a root mean square surface roughness of 0.26 nm. The maximum difference of peaks and valleys is about 1.5 nm. The Q-factor was characterized to be 9.24 × 109at 1550 nm by the cavity ring-down spectroscopy. A single soliton optical frequency comb was generated by pumping the microcavity with 150 mW optical power.",

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AU - Wang, Yongtian

AU - Pan, Yijie

AU - Qu, Jifeng

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Fabrication of an ultra-high quality MgF₂ micro-resonator for a single soliton comb generation

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