Fabrication of an ultra-high quality MgF2 micro-resonator for a single soliton comb generation

Zhier Qu; Xianwen Liu; Cheng Zhang; Jin Wang; Yongtian Wang; Yijie Pan; Jifeng Qu

doi:10.1364/OE.478863

Fabrication of an ultra-high quality MgF₂ micro-resonator for a single soliton comb generation

Zhier Qu, Xianwen Liu, Cheng Zhang, Jin Wang, Yongtian Wang, Yijie Pan^*, Jifeng Qu

^*Corresponding author for this work

School of Optics and Photonics

Research output: Contribution to journal › Article › peer-review

8 Citations (Scopus)

Abstract

Crystalline micro-resonators are attractive for a wide range of applications due to their extremely high quality (Q) factor. In this paper, we develop a semi-automatic method for fabricating ultra-high Q-factor MgF₂ crystalline micro-resonators. By utilizing a force feedback sensor and corresponding control, we made a semi-automatic precision grind-and-polishing machine, and successfully fabricated trapezoid MgF₂ resonators with diameter of 9.5 mm and a root mean square surface roughness of 0.26 nm. The maximum difference of peaks and valleys is about 1.5 nm. The Q-factor was characterized to be 9.24 × 10⁹at 1550 nm by the cavity ring-down spectroscopy. A single soliton optical frequency comb was generated by pumping the microcavity with 150 mW optical power.

Original language	English
Pages (from-to)	3005-3016
Number of pages	12
Journal	Optics Express
Volume	31
Issue number	2
DOIs	https://doi.org/10.1364/OE.478863
Publication status	Published - 16 Jan 2023

Access to Document

10.1364/OE.478863

Cite this

@article{c982e21275df4fcfb0ce88a8becf49db,

title = "Fabrication of an ultra-high quality MgF2 micro-resonator for a single soliton comb generation",

abstract = "Crystalline micro-resonators are attractive for a wide range of applications due to their extremely high quality (Q) factor. In this paper, we develop a semi-automatic method for fabricating ultra-high Q-factor MgF2 crystalline micro-resonators. By utilizing a force feedback sensor and corresponding control, we made a semi-automatic precision grind-and-polishing machine, and successfully fabricated trapezoid MgF2 resonators with diameter of 9.5 mm and a root mean square surface roughness of 0.26 nm. The maximum difference of peaks and valleys is about 1.5 nm. The Q-factor was characterized to be 9.24 × 109at 1550 nm by the cavity ring-down spectroscopy. A single soliton optical frequency comb was generated by pumping the microcavity with 150 mW optical power.",

author = "Zhier Qu and Xianwen Liu and Cheng Zhang and Jin Wang and Yongtian Wang and Yijie Pan and Jifeng Qu",

note = "Publisher Copyright: {\textcopyright} 2023 Optica Publishing Group under the terms of the Optica Open Access Publishing Agreement",

year = "2023",

month = jan,

day = "16",

doi = "10.1364/OE.478863",

language = "English",

volume = "31",

pages = "3005--3016",

journal = "Optics Express",

issn = "1094-4087",

publisher = "Optica Publishing Group",

number = "2",

}

TY - JOUR

T1 - Fabrication of an ultra-high quality MgF2 micro-resonator for a single soliton comb generation

AU - Qu, Zhier

AU - Liu, Xianwen

AU - Zhang, Cheng

AU - Wang, Jin

AU - Wang, Yongtian

AU - Pan, Yijie

AU - Qu, Jifeng

PY - 2023/1/16

Y1 - 2023/1/16

N2 - Crystalline micro-resonators are attractive for a wide range of applications due to their extremely high quality (Q) factor. In this paper, we develop a semi-automatic method for fabricating ultra-high Q-factor MgF2 crystalline micro-resonators. By utilizing a force feedback sensor and corresponding control, we made a semi-automatic precision grind-and-polishing machine, and successfully fabricated trapezoid MgF2 resonators with diameter of 9.5 mm and a root mean square surface roughness of 0.26 nm. The maximum difference of peaks and valleys is about 1.5 nm. The Q-factor was characterized to be 9.24 × 109at 1550 nm by the cavity ring-down spectroscopy. A single soliton optical frequency comb was generated by pumping the microcavity with 150 mW optical power.

AB - Crystalline micro-resonators are attractive for a wide range of applications due to their extremely high quality (Q) factor. In this paper, we develop a semi-automatic method for fabricating ultra-high Q-factor MgF2 crystalline micro-resonators. By utilizing a force feedback sensor and corresponding control, we made a semi-automatic precision grind-and-polishing machine, and successfully fabricated trapezoid MgF2 resonators with diameter of 9.5 mm and a root mean square surface roughness of 0.26 nm. The maximum difference of peaks and valleys is about 1.5 nm. The Q-factor was characterized to be 9.24 × 109at 1550 nm by the cavity ring-down spectroscopy. A single soliton optical frequency comb was generated by pumping the microcavity with 150 mW optical power.

UR - http://www.scopus.com/inward/record.url?scp=85146438509&partnerID=8YFLogxK

U2 - 10.1364/OE.478863

DO - 10.1364/OE.478863

M3 - Article

C2 - 36785301

AN - SCOPUS:85146438509

SN - 1094-4087

VL - 31

SP - 3005

EP - 3016

JO - Optics Express

JF - Optics Express

IS - 2

ER -

Fabrication of an ultra-high quality MgF₂ micro-resonator for a single soliton comb generation

Abstract

Access to Document

Other files and links

Fingerprint

Cite this