Abstract
To eliminate the mechanical coupling error of micro-quartz tuning fork gyroscope, this work uses mass adjustment technique by electroplating gold mass on the tuning fork. With the orthogonal test, the effects of temperature, current and mixing speed on the surface roughness of mass are observed and the height of gold mass versus time is analyzed. Therefore the parameters of fabrication could be determined as follows. The temperature should be controlled at 70°C, the electric current be set to 5 mA, mixing speed be set to 900 r/min and the electroplating time is 130 min. It is shown that, after preliminary laser trimming, the mechanical coupling error of gyroscope is decreased from 1.840 V to 0.132 V, and the performance of micro quartz gyroscope is improved.
Original language | English |
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Pages (from-to) | 985-990 |
Number of pages | 6 |
Journal | Beijing Ligong Daxue Xuebao/Transaction of Beijing Institute of Technology |
Volume | 33 |
Issue number | 9 |
Publication status | Published - Sept 2013 |
Keywords
- Mechanical coupling error
- Micro quartz gyroscope
- Micro-electroplating
- Orthogonal test
- Sulfite gold electroplating