Experimental Realization of 16-Pixel Terahertz Receiver Front-End Based on Bulk Silicon MEMS Power Divider and AlGaN/GaN HEMT Linear Detector Array

A 16-pixel terahertz (THz) receiver front-end working at room temperature was designed, built, and measured in this paper. The designed receiver front-end is based on the antenna-coupled AlGaN/GaN high-electron-mobility transistor (HEMT) THz linear detector array (TeraLDA) and a 16-way THz power divider. The local oscillator (LO) signal is divided by the power divider into 16 ways and transmits to the TeraLDA. Each detector contains a planar unified antenna printed on a 150 (Formula presented.) -thick sapphire substrate and a transistor fabricated on AlGaN/GaN heterostructure. There are 16 silicon hemispheric lenses located on the TeraLDA to increase the responsivity of the TeraLDA. The focus of each lens is aligned in the center of the TeraLDA pixels. Depending on different read out circuits, the receiver front-end could work in homodyne and heterodyne modes. The 16-way power divider is a four-stage power divider that consists of fifteen same 2-way dividers, and was fabricated by bulk silicon microelectromechanical systems (MEMS) technology to achieve low insertion loss (IL). This designed receiver front-end could be a key component of a THz coherent focal plane imaging radar system, that may play a crucial role in nondestructive 3D imaging application.