Experimental and Theoretical Optimization of Radio Frequency Hollow Cathode Discharge

Xin Xian Jiang; Wei Ping Li; Shao Wei Xu; Feng He; Qiang Chen

doi:10.1007/s11090-016-9770-x

Experimental and Theoretical Optimization of Radio Frequency Hollow Cathode Discharge

Xin Xian Jiang^*, Wei Ping Li, Shao Wei Xu, Feng He, Qiang Chen

^*Corresponding author for this work

School of Physics

Research output: Contribution to journal › Article › peer-review

7 Citations (Scopus)

Abstract

In this paper, the electron density in radio frequency (RF) hollow cathode discharge (HCD) is investigated in experiments and in simulation based on two-dimensional (2D) fluid model. The role of hole diameter on plasma density in RF HCD have been explored at various gas pressures. It is found that the optimal hole size for maximum plasma density decreases along with the increase of gas pressure, which is confirmed by simulated results. The simulations reveal that the high plasma density is owing to the hollow cathode effect in the hollow cathode. It is obtained that the optimal hole diameter in RF HCD is approximately sum of twice thickness of plasma sheath and triple the electron-neutral mean free path.

Original language	English
Pages (from-to)	1281-1290
Number of pages	10
Journal	Plasma Chemistry and Plasma Processing
Volume	37
Issue number	4
DOIs	https://doi.org/10.1007/s11090-016-9770-x
Publication status	Published - 1 Jul 2017

Keywords

Hollow cathode discharge
Plasma
Radio frequency

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title = "Experimental and Theoretical Optimization of Radio Frequency Hollow Cathode Discharge",

abstract = "In this paper, the electron density in radio frequency (RF) hollow cathode discharge (HCD) is investigated in experiments and in simulation based on two-dimensional (2D) fluid model. The role of hole diameter on plasma density in RF HCD have been explored at various gas pressures. It is found that the optimal hole size for maximum plasma density decreases along with the increase of gas pressure, which is confirmed by simulated results. The simulations reveal that the high plasma density is owing to the hollow cathode effect in the hollow cathode. It is obtained that the optimal hole diameter in RF HCD is approximately sum of twice thickness of plasma sheath and triple the electron-neutral mean free path.",

keywords = "Hollow cathode discharge, Plasma, Radio frequency",

author = "Jiang, {Xin Xian} and Li, {Wei Ping} and Xu, {Shao Wei} and Feng He and Qiang Chen",

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T1 - Experimental and Theoretical Optimization of Radio Frequency Hollow Cathode Discharge

AU - Jiang, Xin Xian

AU - Li, Wei Ping

AU - Xu, Shao Wei

AU - He, Feng

AU - Chen, Qiang

PY - 2017/7/1

Y1 - 2017/7/1

N2 - In this paper, the electron density in radio frequency (RF) hollow cathode discharge (HCD) is investigated in experiments and in simulation based on two-dimensional (2D) fluid model. The role of hole diameter on plasma density in RF HCD have been explored at various gas pressures. It is found that the optimal hole size for maximum plasma density decreases along with the increase of gas pressure, which is confirmed by simulated results. The simulations reveal that the high plasma density is owing to the hollow cathode effect in the hollow cathode. It is obtained that the optimal hole diameter in RF HCD is approximately sum of twice thickness of plasma sheath and triple the electron-neutral mean free path.

AB - In this paper, the electron density in radio frequency (RF) hollow cathode discharge (HCD) is investigated in experiments and in simulation based on two-dimensional (2D) fluid model. The role of hole diameter on plasma density in RF HCD have been explored at various gas pressures. It is found that the optimal hole size for maximum plasma density decreases along with the increase of gas pressure, which is confirmed by simulated results. The simulations reveal that the high plasma density is owing to the hollow cathode effect in the hollow cathode. It is obtained that the optimal hole diameter in RF HCD is approximately sum of twice thickness of plasma sheath and triple the electron-neutral mean free path.

KW - Hollow cathode discharge

KW - Plasma

KW - Radio frequency

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JO - Plasma Chemistry and Plasma Processing

JF - Plasma Chemistry and Plasma Processing

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ER -

Experimental and Theoretical Optimization of Radio Frequency Hollow Cathode Discharge

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