Electrothermally actuated MEMS mirrors Design, modeling, and applications

Huikai Xie; Xiaoyang Zhang; Liang Zhou; Sagnik Pal

doi:10.1201/9781315151557-7

Electrothermally actuated MEMS mirrors Design, modeling, and applications

Huikai Xie, Xiaoyang Zhang, Liang Zhou, Sagnik Pal

University of Florida

Research output: Chapter in Book/Report/Conference proceeding › Chapter › peer-review

Abstract

Mirrors are the fundamental building blocks for a wide range of optical systems, such as lasers, cameras, and optical microscopes. They may be stationary or scanning. Scanning mirrors manipulate light in free space and can be used to modulate, steer, deflect, or switch optical beams; they are the critical components in many active optical systems for optical imaging, ranging, switching, display, and laser cutting. Scanning mirrors can be categorized into two types: angular scanning mirrors and linear scanning mirrors. Most commonly used angular scanning mirrors are galvanometers, while linear scanning mirrors are often based on linear motors or piezoelectric actuators.

Original language	English
Title of host publication	Optical MEMS, Nanophotonics, and Their Applications
Publisher	CRC Press
Pages	159-196
Number of pages	38
ISBN (Electronic)	9781498741347
ISBN (Print)	9781498741330
DOIs	https://doi.org/10.1201/9781315151557-7
Publication status	Published - 1 Jan 2017
Externally published	Yes

Access to Document

10.1201/9781315151557-7

Cite this

@inbook{46f216c541334280b54b6460b92c4361,

title = "Electrothermally actuated MEMS mirrors Design, modeling, and applications",

abstract = "Mirrors are the fundamental building blocks for a wide range of optical systems, such as lasers, cameras, and optical microscopes. They may be stationary or scanning. Scanning mirrors manipulate light in free space and can be used to modulate, steer, deflect, or switch optical beams; they are the critical components in many active optical systems for optical imaging, ranging, switching, display, and laser cutting. Scanning mirrors can be categorized into two types: angular scanning mirrors and linear scanning mirrors. Most commonly used angular scanning mirrors are galvanometers, while linear scanning mirrors are often based on linear motors or piezoelectric actuators.",

author = "Huikai Xie and Xiaoyang Zhang and Liang Zhou and Sagnik Pal",

note = "Publisher Copyright: {\textcopyright} 2018 by Taylor & Francis Group, LLC.",

year = "2017",

month = jan,

day = "1",

doi = "10.1201/9781315151557-7",

language = "English",

isbn = "9781498741330",

pages = "159--196",

booktitle = "Optical MEMS, Nanophotonics, and Their Applications",

publisher = "CRC Press",

}

TY - CHAP

T1 - Electrothermally actuated MEMS mirrors Design, modeling, and applications

AU - Xie, Huikai

AU - Zhang, Xiaoyang

AU - Zhou, Liang

AU - Pal, Sagnik

PY - 2017/1/1

Y1 - 2017/1/1

N2 - Mirrors are the fundamental building blocks for a wide range of optical systems, such as lasers, cameras, and optical microscopes. They may be stationary or scanning. Scanning mirrors manipulate light in free space and can be used to modulate, steer, deflect, or switch optical beams; they are the critical components in many active optical systems for optical imaging, ranging, switching, display, and laser cutting. Scanning mirrors can be categorized into two types: angular scanning mirrors and linear scanning mirrors. Most commonly used angular scanning mirrors are galvanometers, while linear scanning mirrors are often based on linear motors or piezoelectric actuators.

AB - Mirrors are the fundamental building blocks for a wide range of optical systems, such as lasers, cameras, and optical microscopes. They may be stationary or scanning. Scanning mirrors manipulate light in free space and can be used to modulate, steer, deflect, or switch optical beams; they are the critical components in many active optical systems for optical imaging, ranging, switching, display, and laser cutting. Scanning mirrors can be categorized into two types: angular scanning mirrors and linear scanning mirrors. Most commonly used angular scanning mirrors are galvanometers, while linear scanning mirrors are often based on linear motors or piezoelectric actuators.

UR - http://www.scopus.com/inward/record.url?scp=85131474518&partnerID=8YFLogxK

U2 - 10.1201/9781315151557-7

DO - 10.1201/9781315151557-7

M3 - Chapter

AN - SCOPUS:85131474518

SN - 9781498741330

SP - 159

EP - 196

BT - Optical MEMS, Nanophotonics, and Their Applications

PB - CRC Press

ER -

Electrothermally actuated MEMS mirrors Design, modeling, and applications

Abstract

Access to Document

Other files and links

Fingerprint

Cite this