Abstract
A waveguide structure is designed and fabricated to provide a path for propagating light from device substrate to a movable mirror plate. The device is constructed with three pairs of electrothermal actuators that enable vertical motion with ultralow lateral shift. The actuators enable actuation of the waveguide over 56μm at only 1.2V from an initial displacement of 217μm. The measured resistance of the actuator pairs is 52μ, and the device consumes a maximum power of 75mW with all actuator pairs at peak power.
| Original language | English |
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| Title of host publication | Optical MEMS and Nanophotonics 2013, OMN 2013 - Proceedings |
| Pages | 109-110 |
| Number of pages | 2 |
| DOIs | |
| Publication status | Published - 2013 |
| Externally published | Yes |
| Event | 2013 International Conference on Optical MEMS and Nanophotonics, OMN 2013 - Kanazawa, Japan Duration: 18 Aug 2013 → 22 Aug 2013 |
Publication series
| Name | International Conference on Optical MEMS and Nanophotonics |
|---|---|
| ISSN (Print) | 2160-5033 |
| ISSN (Electronic) | 2160-5041 |
Conference
| Conference | 2013 International Conference on Optical MEMS and Nanophotonics, OMN 2013 |
|---|---|
| Country/Territory | Japan |
| City | Kanazawa |
| Period | 18/08/13 → 22/08/13 |
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Samuelson, S. R., & Xie, H. (2013). Electrothermally actuated large displacement waveguides. In Optical MEMS and Nanophotonics 2013, OMN 2013 - Proceedings (pp. 109-110). Article 6659083 (International Conference on Optical MEMS and Nanophotonics). https://doi.org/10.1109/OMN.2013.6659083