TY - GEN
T1 - Electrothermally actuated large displacement waveguides
AU - Samuelson, Sean R.
AU - Xie, Huikai
PY - 2013
Y1 - 2013
N2 - A waveguide structure is designed and fabricated to provide a path for propagating light from device substrate to a movable mirror plate. The device is constructed with three pairs of electrothermal actuators that enable vertical motion with ultralow lateral shift. The actuators enable actuation of the waveguide over 56μm at only 1.2V from an initial displacement of 217μm. The measured resistance of the actuator pairs is 52μ, and the device consumes a maximum power of 75mW with all actuator pairs at peak power.
AB - A waveguide structure is designed and fabricated to provide a path for propagating light from device substrate to a movable mirror plate. The device is constructed with three pairs of electrothermal actuators that enable vertical motion with ultralow lateral shift. The actuators enable actuation of the waveguide over 56μm at only 1.2V from an initial displacement of 217μm. The measured resistance of the actuator pairs is 52μ, and the device consumes a maximum power of 75mW with all actuator pairs at peak power.
UR - http://www.scopus.com/inward/record.url?scp=84892171099&partnerID=8YFLogxK
U2 - 10.1109/OMN.2013.6659083
DO - 10.1109/OMN.2013.6659083
M3 - Conference contribution
AN - SCOPUS:84892171099
SN - 9781479915125
T3 - International Conference on Optical MEMS and Nanophotonics
SP - 109
EP - 110
BT - Optical MEMS and Nanophotonics 2013, OMN 2013 - Proceedings
T2 - 2013 International Conference on Optical MEMS and Nanophotonics, OMN 2013
Y2 - 18 August 2013 through 22 August 2013
ER -