Electromechanical properties of microcantilever actuated by enhanced piezoelectric PZT thick film

Hong Mei Liu; Quan Liang Zhao; Mao Sheng Cao; Jie Yuan; Zhong Xia Duan; Cheng Jun Qiu

doi:10.1088/0256-307X/25/11/079

Electromechanical properties of microcantilever actuated by enhanced piezoelectric PZT thick film

Hong Mei Liu, Quan Liang Zhao, Mao Sheng Cao, Jie Yuan^*, Zhong Xia Duan, Cheng Jun Qiu

^*Corresponding author for this work

School of Material Science and Engineering

Research output: Contribution to journal › Article › peer-review

16 Citations (Scopus)

Abstract

Pb(Zr_0.53, Ti_0.47)O₃ (PZT) films with thicknesses of 0.8μm, 2μm and 4μm are prepared by a sol-gel method and their longitudinal piezoelectric coefficients are analysed. The results show that the PZT thick films, whose density is closer to bulk PZT, has the better crystallization, with d₃₃ and density much larger than those of PZT thin films. A piezoelectric microcantilever actuated by a 4-μm-thick PZT film is fabricated and its displacement is measured in different frequencies and voltages. The displacement increases linearly with the increasing bias, and the maximum displacement of 0.544 μm is observed at 30kHz for 5V bias. The resonant frequency obtained in the experiment matches quite well with the theoretical result, and it is shown that the resonant frequency of PZT microcantilever could be controlled and predicated.

Original language	English
Pages (from-to)	4128-4130
Number of pages	3
Journal	Chinese Physics Letters
Volume	25
Issue number	11
DOIs	https://doi.org/10.1088/0256-307X/25/11/079
Publication status	Published - 1 Nov 2008

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title = "Electromechanical properties of microcantilever actuated by enhanced piezoelectric PZT thick film",

abstract = "Pb(Zr0.53, Ti0.47)O3 (PZT) films with thicknesses of 0.8μm, 2μm and 4μm are prepared by a sol-gel method and their longitudinal piezoelectric coefficients are analysed. The results show that the PZT thick films, whose density is closer to bulk PZT, has the better crystallization, with d33 and density much larger than those of PZT thin films. A piezoelectric microcantilever actuated by a 4-μm-thick PZT film is fabricated and its displacement is measured in different frequencies and voltages. The displacement increases linearly with the increasing bias, and the maximum displacement of 0.544 μm is observed at 30kHz for 5V bias. The resonant frequency obtained in the experiment matches quite well with the theoretical result, and it is shown that the resonant frequency of PZT microcantilever could be controlled and predicated.",

author = "Liu, {Hong Mei} and Zhao, {Quan Liang} and Cao, {Mao Sheng} and Jie Yuan and Duan, {Zhong Xia} and Qiu, {Cheng Jun}",

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doi = "10.1088/0256-307X/25/11/079",

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T1 - Electromechanical properties of microcantilever actuated by enhanced piezoelectric PZT thick film

AU - Liu, Hong Mei

AU - Zhao, Quan Liang

AU - Cao, Mao Sheng

AU - Yuan, Jie

AU - Duan, Zhong Xia

AU - Qiu, Cheng Jun

PY - 2008/11/1

Y1 - 2008/11/1

N2 - Pb(Zr0.53, Ti0.47)O3 (PZT) films with thicknesses of 0.8μm, 2μm and 4μm are prepared by a sol-gel method and their longitudinal piezoelectric coefficients are analysed. The results show that the PZT thick films, whose density is closer to bulk PZT, has the better crystallization, with d33 and density much larger than those of PZT thin films. A piezoelectric microcantilever actuated by a 4-μm-thick PZT film is fabricated and its displacement is measured in different frequencies and voltages. The displacement increases linearly with the increasing bias, and the maximum displacement of 0.544 μm is observed at 30kHz for 5V bias. The resonant frequency obtained in the experiment matches quite well with the theoretical result, and it is shown that the resonant frequency of PZT microcantilever could be controlled and predicated.

AB - Pb(Zr0.53, Ti0.47)O3 (PZT) films with thicknesses of 0.8μm, 2μm and 4μm are prepared by a sol-gel method and their longitudinal piezoelectric coefficients are analysed. The results show that the PZT thick films, whose density is closer to bulk PZT, has the better crystallization, with d33 and density much larger than those of PZT thin films. A piezoelectric microcantilever actuated by a 4-μm-thick PZT film is fabricated and its displacement is measured in different frequencies and voltages. The displacement increases linearly with the increasing bias, and the maximum displacement of 0.544 μm is observed at 30kHz for 5V bias. The resonant frequency obtained in the experiment matches quite well with the theoretical result, and it is shown that the resonant frequency of PZT microcantilever could be controlled and predicated.

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U2 - 10.1088/0256-307X/25/11/079

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VL - 25

SP - 4128

EP - 4130

JO - Chinese Physics Letters

JF - Chinese Physics Letters

IS - 11

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Electromechanical properties of microcantilever actuated by enhanced piezoelectric PZT thick film

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