TY - JOUR
T1 - Electrical contact performance of MEMS acceleration switch fabricated by UV-LIGA technology
AU - Zhou, Zhijian
AU - Nie, Weirong
AU - Xi, Zhanwen
AU - Wang, Xiaofeng
N1 - Publisher Copyright:
© 2015, Springer-Verlag Berlin Heidelberg.
PY - 2015/10/22
Y1 - 2015/10/22
N2 - This paper expanded a micro-contact resistance model to investigate the contact performance for a acceleration switch fabricated by UV-LIGA (Ultra-violet Lithographie, Galvanoformung and Abformung) technology. Based on the relationship between the contact radius a and electron mean free path λ, three different contact resistance models have been analyzed. The material properties (elastic modulus E, hardness H and Poisson’s ratio v) and surface topographic parameters (asperity summit radius r, standard deviation of height distribution σ, and surface density of asperity) have been studied to evaluate the contact resistance-load characteristics. The results show that the theoretical prediction of contact resistance-load characteristics correlates well with the experimental results except there exists experimental discrepancy. The discrepancy between theoretical predictions and experimental results mainly is due to the contaminations, errors from assumptions, surface oxidation and external environmental conditions.
AB - This paper expanded a micro-contact resistance model to investigate the contact performance for a acceleration switch fabricated by UV-LIGA (Ultra-violet Lithographie, Galvanoformung and Abformung) technology. Based on the relationship between the contact radius a and electron mean free path λ, three different contact resistance models have been analyzed. The material properties (elastic modulus E, hardness H and Poisson’s ratio v) and surface topographic parameters (asperity summit radius r, standard deviation of height distribution σ, and surface density of asperity) have been studied to evaluate the contact resistance-load characteristics. The results show that the theoretical prediction of contact resistance-load characteristics correlates well with the experimental results except there exists experimental discrepancy. The discrepancy between theoretical predictions and experimental results mainly is due to the contaminations, errors from assumptions, surface oxidation and external environmental conditions.
UR - http://www.scopus.com/inward/record.url?scp=84941992781&partnerID=8YFLogxK
U2 - 10.1007/s00542-015-2621-5
DO - 10.1007/s00542-015-2621-5
M3 - Article
AN - SCOPUS:84941992781
SN - 0946-7076
VL - 21
SP - 2271
EP - 2278
JO - Microsystem Technologies
JF - Microsystem Technologies
IS - 10
ER -