Effect of the β phase on compressive mechanical property of CVD tungsten

Yanwei Lü; Xiaodong Yu; Chengwen Tan; Tiefeng Sun; Kunsong Ma; Hongnian Cai

Effect of the β phase on compressive mechanical property of CVD tungsten

Yanwei Lü, Xiaodong Yu, Chengwen Tan^*, Tiefeng Sun, Kunsong Ma, Hongnian Cai

^*Corresponding author for this work

School of Material Science and Engineering

Research output: Contribution to journal › Article › peer-review

15 Citations (Scopus)

Abstract

The high pure W (HPW) was deposited on the surface of purity Cu tubes through WF₆ reduction by H₂ adopting cold-wall atmospheric pressure CVD system. Results show that the compressive strength of the tungsten tube with the mixture phase deposited at 440°C is much lower than that with only α phase deposited at 540°C. The existence of β phase has a significant negative influence on the compressive property. After annealing treatment at 400°C for 1 h, the β phase in the mixture will disappear, and its compressive strength reaches the level of the as-deposited α-W.

Original language	English
Pages (from-to)	1138-1140
Number of pages	3
Journal	Xiyou Jinshu Cailiao Yu Gongcheng/Rare Metal Materials and Engineering
Volume	40
Issue number	7
Publication status	Published - Jul 2011

Keywords

Annealing treatment
CVD tungsten
Compressive property
Phase composition

Cite this

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title = "Effect of the β phase on compressive mechanical property of CVD tungsten",

abstract = "The high pure W (HPW) was deposited on the surface of purity Cu tubes through WF6 reduction by H2 adopting cold-wall atmospheric pressure CVD system. Results show that the compressive strength of the tungsten tube with the mixture phase deposited at 440°C is much lower than that with only α phase deposited at 540°C. The existence of β phase has a significant negative influence on the compressive property. After annealing treatment at 400°C for 1 h, the β phase in the mixture will disappear, and its compressive strength reaches the level of the as-deposited α-W.",

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author = "Yanwei L{\"u} and Xiaodong Yu and Chengwen Tan and Tiefeng Sun and Kunsong Ma and Hongnian Cai",

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language = "English",

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journal = "Xiyou Jinshu Cailiao Yu Gongcheng/Rare Metal Materials and Engineering",

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TY - JOUR

T1 - Effect of the β phase on compressive mechanical property of CVD tungsten

AU - Lü, Yanwei

AU - Yu, Xiaodong

AU - Tan, Chengwen

AU - Sun, Tiefeng

AU - Ma, Kunsong

AU - Cai, Hongnian

PY - 2011/7

Y1 - 2011/7

N2 - The high pure W (HPW) was deposited on the surface of purity Cu tubes through WF6 reduction by H2 adopting cold-wall atmospheric pressure CVD system. Results show that the compressive strength of the tungsten tube with the mixture phase deposited at 440°C is much lower than that with only α phase deposited at 540°C. The existence of β phase has a significant negative influence on the compressive property. After annealing treatment at 400°C for 1 h, the β phase in the mixture will disappear, and its compressive strength reaches the level of the as-deposited α-W.

AB - The high pure W (HPW) was deposited on the surface of purity Cu tubes through WF6 reduction by H2 adopting cold-wall atmospheric pressure CVD system. Results show that the compressive strength of the tungsten tube with the mixture phase deposited at 440°C is much lower than that with only α phase deposited at 540°C. The existence of β phase has a significant negative influence on the compressive property. After annealing treatment at 400°C for 1 h, the β phase in the mixture will disappear, and its compressive strength reaches the level of the as-deposited α-W.

KW - Annealing treatment

KW - CVD tungsten

KW - Compressive property

KW - Phase composition

UR - http://www.scopus.com/inward/record.url?scp=80052128362&partnerID=8YFLogxK

M3 - Article

AN - SCOPUS:80052128362

SN - 1002-185X

VL - 40

SP - 1138

EP - 1140

JO - Xiyou Jinshu Cailiao Yu Gongcheng/Rare Metal Materials and Engineering

JF - Xiyou Jinshu Cailiao Yu Gongcheng/Rare Metal Materials and Engineering

IS - 7

ER -

Effect of the β phase on compressive mechanical property of CVD tungsten

Abstract

Keywords

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