Abstract
The numerical model for calculating the parameters of the inductively-coupled RF plasmatron (ICP) with gas cooling was presented. Numerical simulations were performed in the application package ANSYS CFX (14.5) for one of the specific design of technological options ICP with a three-coils inductor and amplitude of discharge current in the range JK = 80-250 A (frequency 3 MHz). Three different kinds of flow patterns may be found in ICP torch, depending on the amplitude of discharge current and the flow rate of transporting gas from the central tube: A potential ('mutational') flow pattern and two vortex flow patterns with different profiles. In the Jk-Qi graphic, a diagram has been build to determine the regions of different plasma flow patterns. The main parameters of the vortex are also calculated.
| Original language | English |
|---|---|
| Pages (from-to) | 15-20 |
| Number of pages | 6 |
| Journal | Applied Physics |
| Volume | 2018-January |
| Issue number | 2 |
| Publication status | Published - 2018 |
| Externally published | Yes |
Keywords
- Critical flow rate
- Diagram
- Discharge current
- Flow pattern
- Reversed flow
- Rf-icp
- Vortex intensity