Development of open type microwave plasma source

Microwave plasma holds some promise in practical applications due to a series of advantages such as free from contamination by electrodes, the possibility of generation at atmosphere pressure, high electron density and so on. Therefore, the study on atmosphere open microwave plasma source is key to the realization of related industrial application value. First, we research the APMPS-I type microwave plasma source that can excite air microwave plasma at low pressure, successively through APMPS+JET type, APMPS-II type, we finally reach the design of parallel rectilinear rectangle waveguide microwave plasma reactor by the addition of auxiliary equipment called ionization jet or the improvement of the dimensions and structure of reactor cavity in our laboratory. And the excitation of atmosphere open type air microwave plasma can be realized by means of the reactors above. The distribution of electric-field strength in all kinds of cavities is simulated by a kind of simulation software named CST. Also the principle and relevant characteristics of all kinds of microwave plasma source are elaborated, and the morphology of microwave plasma is analyzed in detail. It can be perceived that the distribution of plasma and the distribution of electric-field strength are relatively consistent. Besides, the evolution of plasma is also in accordance with the electric-field distribution. In a word, the realization of relatively stable and uniform atmosphere open air microwave plasma is feasible.