Determinations of plasma density and decay time in the hollow cathode discharge by microwave transmission

Lin Zhang; Feng He; Shi Chao Li; Ji Ting Ouyang

doi:10.1088/1674-1056/22/12/125202

Determinations of plasma density and decay time in the hollow cathode discharge by microwave transmission

Lin Zhang, Feng He, Shi Chao Li, Ji Ting Ouyang^*

^*Corresponding author for this work

School of Physics

Beijing Institute of Technology

Research output: Contribution to journal › Article › peer-review

12 Citations (Scopus)

Abstract

The microwave (MW) transmission method is employed to measure both the plasma density and the plasma decay time in the hollow cathode discharge (HCD) in argon at low pressure. The plasma density in DC-driven or pulsed HCD is on the order of 10¹² cm^-3, which can block the X-band MW effectively. In the case of pulsed HCD, the MW transmittance shows the same waveform as the pulsed current during the rising edge if the driving frequency is low, but with a longer delay during the falling edge. The MW transmittance reaches a constant low level when the driving frequency is high enough. The plasma decay time in the HCD system is measured to be about 100 μs around a pressure of 120 Pa. The ambipolar diffusion is considered to be the major mechanism in the decay process.

Original language	English
Article number	125202
Journal	Chinese Physics B
Volume	22
Issue number	12
DOIs	https://doi.org/10.1088/1674-1056/22/12/125202
Publication status	Published - Dec 2013

Keywords

hollow cathode discharge
microwave transmission
plasma decay
plasma density

Access to Document

10.1088/1674-1056/22/12/125202

Cite this

@article{de130ff59dbe4b0688010020ad68901d,

title = "Determinations of plasma density and decay time in the hollow cathode discharge by microwave transmission",

abstract = "The microwave (MW) transmission method is employed to measure both the plasma density and the plasma decay time in the hollow cathode discharge (HCD) in argon at low pressure. The plasma density in DC-driven or pulsed HCD is on the order of 1012 cm-3, which can block the X-band MW effectively. In the case of pulsed HCD, the MW transmittance shows the same waveform as the pulsed current during the rising edge if the driving frequency is low, but with a longer delay during the falling edge. The MW transmittance reaches a constant low level when the driving frequency is high enough. The plasma decay time in the HCD system is measured to be about 100 μs around a pressure of 120 Pa. The ambipolar diffusion is considered to be the major mechanism in the decay process.",

keywords = "hollow cathode discharge, microwave transmission, plasma decay, plasma density",

author = "Lin Zhang and Feng He and Li, {Shi Chao} and Ouyang, {Ji Ting}",

year = "2013",

month = dec,

doi = "10.1088/1674-1056/22/12/125202",

language = "English",

volume = "22",

journal = "Chinese Physics B",

issn = "1674-1056",

publisher = "IOP Publishing Ltd.",

number = "12",

}

TY - JOUR

T1 - Determinations of plasma density and decay time in the hollow cathode discharge by microwave transmission

AU - Zhang, Lin

AU - He, Feng

AU - Li, Shi Chao

AU - Ouyang, Ji Ting

PY - 2013/12

Y1 - 2013/12

N2 - The microwave (MW) transmission method is employed to measure both the plasma density and the plasma decay time in the hollow cathode discharge (HCD) in argon at low pressure. The plasma density in DC-driven or pulsed HCD is on the order of 1012 cm-3, which can block the X-band MW effectively. In the case of pulsed HCD, the MW transmittance shows the same waveform as the pulsed current during the rising edge if the driving frequency is low, but with a longer delay during the falling edge. The MW transmittance reaches a constant low level when the driving frequency is high enough. The plasma decay time in the HCD system is measured to be about 100 μs around a pressure of 120 Pa. The ambipolar diffusion is considered to be the major mechanism in the decay process.

AB - The microwave (MW) transmission method is employed to measure both the plasma density and the plasma decay time in the hollow cathode discharge (HCD) in argon at low pressure. The plasma density in DC-driven or pulsed HCD is on the order of 1012 cm-3, which can block the X-band MW effectively. In the case of pulsed HCD, the MW transmittance shows the same waveform as the pulsed current during the rising edge if the driving frequency is low, but with a longer delay during the falling edge. The MW transmittance reaches a constant low level when the driving frequency is high enough. The plasma decay time in the HCD system is measured to be about 100 μs around a pressure of 120 Pa. The ambipolar diffusion is considered to be the major mechanism in the decay process.

KW - hollow cathode discharge

KW - microwave transmission

KW - plasma decay

KW - plasma density

UR - http://www.scopus.com/inward/record.url?scp=84891547324&partnerID=8YFLogxK

U2 - 10.1088/1674-1056/22/12/125202

DO - 10.1088/1674-1056/22/12/125202

M3 - Article

AN - SCOPUS:84891547324

SN - 1674-1056

VL - 22

JO - Chinese Physics B

JF - Chinese Physics B

IS - 12

M1 - 125202

ER -

Determinations of plasma density and decay time in the hollow cathode discharge by microwave transmission

Abstract

Keywords

Access to Document

Other files and links

Fingerprint

Cite this