Design, simulation, fabrication and characterization of novel single use MEMS resistor controllers

Two novel types of single use MEMS resistor controllers are described and the performance test results are presented. The increment controller mechanically breaks metallic lines and the decrement controller connects a group of electrodes, therefore, the single use controlling can be realized. Controlling is accomplished by a voltage pulse supplied by an energy storage capacitor through a metal bridge igniter. Key features of the controllers include bistablity, integratability and IC compatibility. The controllers can be driven by external signal with long predicted lifetime, therefore, both controllers can be used in systems for long-term storage. And, planar processing method is used for batch fabrication.