TY - GEN
T1 - Design of MEMS high g accelerometer and study on the overload ability
AU - Shi, Yunbo
AU - Li, Ping
AU - Liu, Jun
PY - 2010
Y1 - 2010
N2 - Aiming to the application requirements of high overload environment, a MEMS acceleration sensor with high overload ability was designed in this paper. It adopted beam - island structure, which dispersed the stress by the chamfer that was on the root and the end of the structure beam when the acceleration effect on the structure. ANSYS simulation results showed that the structure can improve the ability of anti-overload of the acceleration sensor significantly, and the first-order natural frequency can up to 550 kHz. The designed sensor was processed by the standard processing technology, and the ability of anti-overload of the acceleration sensor was tested by Hopkinson bar. The results of the test showed that the signal and structure of the sensor is normal when the designed acceleration sensor was effected on the 230,000 g. The sensitivity of the senor is 0.88uV/g. In such situation, the designed sensor can meet application requirements of high overload environment effectively.
AB - Aiming to the application requirements of high overload environment, a MEMS acceleration sensor with high overload ability was designed in this paper. It adopted beam - island structure, which dispersed the stress by the chamfer that was on the root and the end of the structure beam when the acceleration effect on the structure. ANSYS simulation results showed that the structure can improve the ability of anti-overload of the acceleration sensor significantly, and the first-order natural frequency can up to 550 kHz. The designed sensor was processed by the standard processing technology, and the ability of anti-overload of the acceleration sensor was tested by Hopkinson bar. The results of the test showed that the signal and structure of the sensor is normal when the designed acceleration sensor was effected on the 230,000 g. The sensitivity of the senor is 0.88uV/g. In such situation, the designed sensor can meet application requirements of high overload environment effectively.
KW - High overload ability
KW - Hopkinson impact test
KW - MEMS high g accelerometer
UR - http://www.scopus.com/inward/record.url?scp=78650719432&partnerID=8YFLogxK
U2 - 10.4028/www.scientific.net/AMR.139-141.1582
DO - 10.4028/www.scientific.net/AMR.139-141.1582
M3 - Conference contribution
AN - SCOPUS:78650719432
SN - 9780878492268
T3 - Advanced Materials Research
SP - 1582
EP - 1586
BT - Manufacturing Engineering and Automation I
T2 - 2010 International Conference on Manufacturing Engineering and Automation, ICMEA2010
Y2 - 7 December 2010 through 9 December 2010
ER -