TY - GEN
T1 - Design of a silicon-micro piezoresistive multi-ranged accelerometer
AU - Guo, Tao
AU - Li, Jie
PY - 2010
Y1 - 2010
N2 - Aim at the problems that the requirements of acceleration parameter test in high dynamic range in the application of conventional ammunition guidance, the limits of conventional ammunition space and size, and the errors and great inconvenience brought by using several accelerometers with different ranges, a piezoresistive silicon-micro multi-ranged accelerometer containing four accelerometer units (10g, 100g, 500g, and 10000g) was proposed and designed in this paper. Based on static and dynamic simulation analysis, the static and dynamic characteristics of the processed and packaged piezoresistive silicon-micro multi-ranged accelerometer were calibrated. The calibration results show that the multi-ranged micro accelerometer has good static and dynamic characteristics, and can meet various testing and controlling requirements under different working environment, and can achieve effectively multi-parameters measurement and multi-function control.
AB - Aim at the problems that the requirements of acceleration parameter test in high dynamic range in the application of conventional ammunition guidance, the limits of conventional ammunition space and size, and the errors and great inconvenience brought by using several accelerometers with different ranges, a piezoresistive silicon-micro multi-ranged accelerometer containing four accelerometer units (10g, 100g, 500g, and 10000g) was proposed and designed in this paper. Based on static and dynamic simulation analysis, the static and dynamic characteristics of the processed and packaged piezoresistive silicon-micro multi-ranged accelerometer were calibrated. The calibration results show that the multi-ranged micro accelerometer has good static and dynamic characteristics, and can meet various testing and controlling requirements under different working environment, and can achieve effectively multi-parameters measurement and multi-function control.
KW - Accelerometer
KW - Dynamic characteristics
KW - Multi-ranged
KW - Piezoresistive
KW - Silicon-micro
KW - Static characteristics
UR - http://www.scopus.com/inward/record.url?scp=78650495416&partnerID=8YFLogxK
U2 - 10.1109/PCSPA.2010.153
DO - 10.1109/PCSPA.2010.153
M3 - Conference contribution
AN - SCOPUS:78650495416
SN - 9780769541808
T3 - Proceedings - 2010 1st International Conference on Pervasive Computing, Signal Processing and Applications, PCSPA 2010
SP - 610
EP - 613
BT - Proceedings - 2010 1st International Conference on Pervasive Computing, Signal Processing and Applications, PCSPA 2010
T2 - 1st International Conference on Pervasive Computing, Signal Processing and Applications, PCSPA 2010
Y2 - 17 September 2010 through 19 September 2010
ER -