Design and Testing of MEMS Component for Electromagnetic Pulse Protection

Shiyi Li, Hengzhen Feng*, Wenzhong Lou*, Yuecen Zhao, Sining Lv, Wenxing Kan

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

Abstract

With the demand for high-safety, high-integration, and lightweight micro- and nano-electronic components, an MEMS electromagnetic energy-releasing component was innovatively designed based on the corona discharge theory. The device subverted the traditional device-level protection method for electromagnetic energy, realizing the innovation of adding a complex circuit system to the integrated chip through micro-nanometer processing technology and enhancing the chip’s size from the centimeter level to the micron level. In this paper, the working performance of the MEMS electromagnetic energy-releasing component was verified through a combination of a simulation, a static experiment, and a dynamic test, and a characterization test of the tested MEMS electromagnetic energy-releasing component was carried out to thoroughly analyze the effect of the MEMS electromagnetic energy-releasing component. The results showed that after the strong electromagnetic pulse injection, the pulse breakdown voltage of the MEMS electromagnetic energy-releasing component increased exponentially in terms of the pulse injection voltage, and the residual pulse current decreased significantly from one-third to one-half of the original, representing a significant protective effect. In a DC environment, the breakdown voltage of the needle–needle structure of the MEMS electromagnetic energy-releasing component was 144 V, and the on-time was about 0.5 ms.

Original languageEnglish
Article number221
JournalSensors
Volume25
Issue number1
DOIs
Publication statusPublished - Jan 2025

Keywords

  • MEMS
  • electromagnetic energy diversion
  • response characterization
  • safety protection
  • strong electromagnetic environment

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Li, S., Feng, H., Lou, W., Zhao, Y., Lv, S., & Kan, W. (2025). Design and Testing of MEMS Component for Electromagnetic Pulse Protection. Sensors, 25(1), Article 221. https://doi.org/10.3390/s25010221