TY - JOUR
T1 - Design and Testing of MEMS Component for Electromagnetic Pulse Protection
AU - Li, Shiyi
AU - Feng, Hengzhen
AU - Lou, Wenzhong
AU - Zhao, Yuecen
AU - Lv, Sining
AU - Kan, Wenxing
N1 - Publisher Copyright:
© 2025 by the authors.
PY - 2025/1
Y1 - 2025/1
N2 - With the demand for high-safety, high-integration, and lightweight micro- and nano-electronic components, an MEMS electromagnetic energy-releasing component was innovatively designed based on the corona discharge theory. The device subverted the traditional device-level protection method for electromagnetic energy, realizing the innovation of adding a complex circuit system to the integrated chip through micro-nanometer processing technology and enhancing the chip’s size from the centimeter level to the micron level. In this paper, the working performance of the MEMS electromagnetic energy-releasing component was verified through a combination of a simulation, a static experiment, and a dynamic test, and a characterization test of the tested MEMS electromagnetic energy-releasing component was carried out to thoroughly analyze the effect of the MEMS electromagnetic energy-releasing component. The results showed that after the strong electromagnetic pulse injection, the pulse breakdown voltage of the MEMS electromagnetic energy-releasing component increased exponentially in terms of the pulse injection voltage, and the residual pulse current decreased significantly from one-third to one-half of the original, representing a significant protective effect. In a DC environment, the breakdown voltage of the needle–needle structure of the MEMS electromagnetic energy-releasing component was 144 V, and the on-time was about 0.5 ms.
AB - With the demand for high-safety, high-integration, and lightweight micro- and nano-electronic components, an MEMS electromagnetic energy-releasing component was innovatively designed based on the corona discharge theory. The device subverted the traditional device-level protection method for electromagnetic energy, realizing the innovation of adding a complex circuit system to the integrated chip through micro-nanometer processing technology and enhancing the chip’s size from the centimeter level to the micron level. In this paper, the working performance of the MEMS electromagnetic energy-releasing component was verified through a combination of a simulation, a static experiment, and a dynamic test, and a characterization test of the tested MEMS electromagnetic energy-releasing component was carried out to thoroughly analyze the effect of the MEMS electromagnetic energy-releasing component. The results showed that after the strong electromagnetic pulse injection, the pulse breakdown voltage of the MEMS electromagnetic energy-releasing component increased exponentially in terms of the pulse injection voltage, and the residual pulse current decreased significantly from one-third to one-half of the original, representing a significant protective effect. In a DC environment, the breakdown voltage of the needle–needle structure of the MEMS electromagnetic energy-releasing component was 144 V, and the on-time was about 0.5 ms.
KW - MEMS
KW - electromagnetic energy diversion
KW - response characterization
KW - safety protection
KW - strong electromagnetic environment
UR - http://www.scopus.com/inward/record.url?scp=85214518065&partnerID=8YFLogxK
U2 - 10.3390/s25010221
DO - 10.3390/s25010221
M3 - Article
AN - SCOPUS:85214518065
SN - 1424-8220
VL - 25
JO - Sensors
JF - Sensors
IS - 1
M1 - 221
ER -