Abstract
The paper mainly designs an efficient actuator, with lower voltage input but large displacement output. The calculation method of the MEMS electrothermal actuator considers the convection and radiation besides heat conduction mentioned in most literatures. With the multiphysics simulation by the software Comsol of electrothermal bimorph actuator, the transient effects of thermal convection and thermal radiation on the actuator displacement and the response characteristics of an actuator with a separate heating layer were studied.
| Original language | English |
|---|---|
| Title of host publication | Micro-Nano Technology XIV |
| Publisher | Trans Tech Publications Ltd. |
| Pages | 504-508 |
| Number of pages | 5 |
| ISBN (Print) | 9783037857397 |
| DOIs | |
| Publication status | Published - 2013 |
| Event | 14th Annual Conference and the 3rd International Conference of the Chinese Society of Micro-Nano Technology, CSMNT 2012 - Hangzhou, China Duration: 4 Nov 2012 → 7 Nov 2012 |
Publication series
| Name | Key Engineering Materials |
|---|---|
| Volume | 562-565 |
| ISSN (Print) | 1013-9826 |
| ISSN (Electronic) | 1662-9795 |
Conference
| Conference | 14th Annual Conference and the 3rd International Conference of the Chinese Society of Micro-Nano Technology, CSMNT 2012 |
|---|---|
| Country/Territory | China |
| City | Hangzhou |
| Period | 4/11/12 → 7/11/12 |
Keywords
- Design
- Electrothermal actuator
- MEMS
- Multiphysics
- Simulation
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Song, R., Wang, G., Wang, J., Shen, Y., & Lv, C. (2013). Design and simulation of high efficient MEMS electrothermal actuator. In Micro-Nano Technology XIV (pp. 504-508). (Key Engineering Materials; Vol. 562-565). Trans Tech Publications Ltd.. https://doi.org/10.4028/www.scientific.net/KEM.562-565.504