Design and process of force-electric fusion for electromagnetic driven Si based MEMS S&A

In order to meet the technical requirements for precise control of the arming time in high-dynamic environments and ammunition safety, this article proposes a silicon-based MEMS safety system force-electric fusion design scheme for small-caliber ammunition platforms. Modeling and computational analysis are conducted on the sensitive units in S&A. A mechanical equilibrium model is established to study the centrifugal overload and electromagnetic forces, followed by verification through dynamic simulation. The design aimed to achieve the safety and arming control of the MEMS security system using a plate-type electromagnetic driving scheme. A low driving energy electromagnetic coil model is designed, and the driving capability of the electromagnetic coil is analyzed. It is found that under the condition of a distance of 0.1mm and 8V, a driving force of 270mN could be achieved. Considering the complex operating conditions during the arming process, a low damping model is developed for the arming degree of the MEMS arming device. After the design is completed, the S&A and electromagnetic coils are processed and prepared using deep silicon etching and microcasting techniques. Finally, threshold verification is conducted for the recoil and centrifugal arming mechanisms of the S&A. The designed S&A ultimately achieved a size of less than or equal to ∅ 20mm.