TY - GEN
T1 - Design and fabrication of microheaters for localized carbon nanotube growth
AU - Zhou, Y.
AU - Johnson, J.
AU - Wu, L.
AU - Maley, S.
AU - Ural, A.
AU - Xie, H.
PY - 2008
Y1 - 2008
N2 - This paper presents a reliable method for the growth of single-walled carbon nanotubes (SWNTs) at room temperature by using localized heating. A surface micromachining technique is used to create suspended microstructures for good thermal isolation. Pt resistors are integrated as the heating source, and the local growth temperature and electrical field can be controlled by the heater geometry and applied voltage. Growth of aligned nanotubes with diameters ranging from 1-10 nm has been demonstrated along the local E-field with a measured minimum resistance of approximately 12 kω. High-resolution thermal imaging was used to study the temperature distribution of the local heating.
AB - This paper presents a reliable method for the growth of single-walled carbon nanotubes (SWNTs) at room temperature by using localized heating. A surface micromachining technique is used to create suspended microstructures for good thermal isolation. Pt resistors are integrated as the heating source, and the local growth temperature and electrical field can be controlled by the heater geometry and applied voltage. Growth of aligned nanotubes with diameters ranging from 1-10 nm has been demonstrated along the local E-field with a measured minimum resistance of approximately 12 kω. High-resolution thermal imaging was used to study the temperature distribution of the local heating.
UR - http://www.scopus.com/inward/record.url?scp=55349084762&partnerID=8YFLogxK
U2 - 10.1109/NANO.2008.138
DO - 10.1109/NANO.2008.138
M3 - Conference contribution
AN - SCOPUS:55349084762
SN - 9781424421046
T3 - 2008 8th IEEE Conference on Nanotechnology, IEEE-NANO
SP - 452
EP - 455
BT - 2008 8th IEEE Conference on Nanotechnology, IEEE-NANO
T2 - 2008 8th IEEE Conference on Nanotechnology, IEEE-NANO
Y2 - 18 August 2008 through 21 August 2008
ER -