Design and fabrication of an electromagnetically actuated optical switch with precise tilt angle control

Victor Farm Guoo Tseng; Jiping Li; Xiaoyang Zhang; Huikai Xie

doi:10.1109/OMN.2013.6659062

Design and fabrication of an electromagnetically actuated optical switch with precise tilt angle control

Victor Farm Guoo Tseng, Jiping Li, Xiaoyang Zhang, Huikai Xie

University of Florida

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

An electromagnetically actuated MEMS mirror with precise tilt angle control for a bi-state optical switch is reported. A tilt angle control of ± 2.29° is achieved by utilizing the 4 μm BOX layer thickness of an SOI wafer together with carefully controlled backside deep silicon etching to construct precise mechanical stoppers. The device is die level packaged with a KOH etched textured silicon encapsulation to prevent scattering reflection from the back cavity to promote high contrast. Measurement results of tilt angle versus applied magnetic field correspond well with theoretical model prediction. The designed device is suitable for optical telecommunication in harsh environments that do not permit any electrical sparks.

Original language	English
Title of host publication	Optical MEMS and Nanophotonics 2013, OMN 2013 - Proceedings
Pages	67-68
Number of pages	2
DOIs	https://doi.org/10.1109/OMN.2013.6659062
Publication status	Published - 2013
Externally published	Yes
Event	2013 International Conference on Optical MEMS and Nanophotonics, OMN 2013 - Kanazawa, Japan Duration: 18 Aug 2013 → 22 Aug 2013

Publication series

Name	International Conference on Optical MEMS and Nanophotonics
ISSN (Print)	2160-5033
ISSN (Electronic)	2160-5041

Conference

Conference	2013 International Conference on Optical MEMS and Nanophotonics, OMN 2013
Country/Territory	Japan
City	Kanazawa
Period	18/08/13 → 22/08/13

Access to Document

10.1109/OMN.2013.6659062

Cite this

@inproceedings{d63d8d02552b4deebd69d77b902e5a28,

title = "Design and fabrication of an electromagnetically actuated optical switch with precise tilt angle control",

abstract = "An electromagnetically actuated MEMS mirror with precise tilt angle control for a bi-state optical switch is reported. A tilt angle control of ± 2.29° is achieved by utilizing the 4 μm BOX layer thickness of an SOI wafer together with carefully controlled backside deep silicon etching to construct precise mechanical stoppers. The device is die level packaged with a KOH etched textured silicon encapsulation to prevent scattering reflection from the back cavity to promote high contrast. Measurement results of tilt angle versus applied magnetic field correspond well with theoretical model prediction. The designed device is suitable for optical telecommunication in harsh environments that do not permit any electrical sparks.",

author = "Tseng, {Victor Farm Guoo} and Jiping Li and Xiaoyang Zhang and Huikai Xie",

year = "2013",

doi = "10.1109/OMN.2013.6659062",

language = "English",

isbn = "9781479915125",

series = "International Conference on Optical MEMS and Nanophotonics",

pages = "67--68",

booktitle = "Optical MEMS and Nanophotonics 2013, OMN 2013 - Proceedings",

note = "2013 International Conference on Optical MEMS and Nanophotonics, OMN 2013 ; Conference date: 18-08-2013 Through 22-08-2013",

}

Tseng, VFG, Li, J, Zhang, X & Xie, H 2013, Design and fabrication of an electromagnetically actuated optical switch with precise tilt angle control. in Optical MEMS and Nanophotonics 2013, OMN 2013 - Proceedings., 6659062, International Conference on Optical MEMS and Nanophotonics, pp. 67-68, 2013 International Conference on Optical MEMS and Nanophotonics, OMN 2013, Kanazawa, Japan, 18/08/13. https://doi.org/10.1109/OMN.2013.6659062

Design and fabrication of an electromagnetically actuated optical switch with precise tilt angle control. / Tseng, Victor Farm Guoo; Li, Jiping; Zhang, Xiaoyang et al.
Optical MEMS and Nanophotonics 2013, OMN 2013 - Proceedings. 2013. p. 67-68 6659062 (International Conference on Optical MEMS and Nanophotonics).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Design and fabrication of an electromagnetically actuated optical switch with precise tilt angle control

AU - Tseng, Victor Farm Guoo

AU - Li, Jiping

AU - Zhang, Xiaoyang

AU - Xie, Huikai

PY - 2013

Y1 - 2013

N2 - An electromagnetically actuated MEMS mirror with precise tilt angle control for a bi-state optical switch is reported. A tilt angle control of ± 2.29° is achieved by utilizing the 4 μm BOX layer thickness of an SOI wafer together with carefully controlled backside deep silicon etching to construct precise mechanical stoppers. The device is die level packaged with a KOH etched textured silicon encapsulation to prevent scattering reflection from the back cavity to promote high contrast. Measurement results of tilt angle versus applied magnetic field correspond well with theoretical model prediction. The designed device is suitable for optical telecommunication in harsh environments that do not permit any electrical sparks.

AB - An electromagnetically actuated MEMS mirror with precise tilt angle control for a bi-state optical switch is reported. A tilt angle control of ± 2.29° is achieved by utilizing the 4 μm BOX layer thickness of an SOI wafer together with carefully controlled backside deep silicon etching to construct precise mechanical stoppers. The device is die level packaged with a KOH etched textured silicon encapsulation to prevent scattering reflection from the back cavity to promote high contrast. Measurement results of tilt angle versus applied magnetic field correspond well with theoretical model prediction. The designed device is suitable for optical telecommunication in harsh environments that do not permit any electrical sparks.

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U2 - 10.1109/OMN.2013.6659062

DO - 10.1109/OMN.2013.6659062

M3 - Conference contribution

AN - SCOPUS:84892167593

SN - 9781479915125

T3 - International Conference on Optical MEMS and Nanophotonics

SP - 67

EP - 68

BT - Optical MEMS and Nanophotonics 2013, OMN 2013 - Proceedings

T2 - 2013 International Conference on Optical MEMS and Nanophotonics, OMN 2013

Y2 - 18 August 2013 through 22 August 2013

ER -

Design and fabrication of an electromagnetically actuated optical switch with precise tilt angle control

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