Design and fabrication of a sub-millimeter mixer based on MEMS technology

Jianhua Li; Lixin Xu; Hefeng Chen; Fengqin Wang; Bo Fu

doi:10.3969/j.issn.1004-1699.2015.01.002

Design and fabrication of a sub-millimeter mixer based on MEMS technology

Jianhua Li^*, Lixin Xu, Hefeng Chen, Fengqin Wang, Bo Fu

^*Corresponding author for this work

Huaihai Industries Group Co., Ltd.

Research output: Contribution to journal › Article › peer-review

1 Citation (Scopus)

Abstract

Mixer is a basic RF device for signal transportation and has potential applications in many fields. A novel sub-millimeter mixer device based on MEMS technology has been designed and fabricated. In this design, SU-8 photoresist which has a high dielectric constant, was used as the dielectric layer of the device. The subsequent processes, such as photolithography, electroplating of micro-strip etc., were carried out on SU-8 dielectric layer. By using positive- and negative photoresist sacrifical process, a novel sub-millimeter mixer was demonstrated.

Original language	English
Pages (from-to)	9-12
Number of pages	4
Journal	Chinese Journal of Sensors and Actuators
Volume	28
Issue number	1
DOIs	https://doi.org/10.3969/j.issn.1004-1699.2015.01.002
Publication status	Published - 1 Jan 2015

Keywords

MEMS:micro-strip
Mixer
Sacrifical process
Sub-millimeter

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10.3969/j.issn.1004-1699.2015.01.002

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Li, J., Xu, L., Chen, H., Wang, F., & Fu, B. (2015). Design and fabrication of a sub-millimeter mixer based on MEMS technology. Chinese Journal of Sensors and Actuators, 28(1), 9-12. https://doi.org/10.3969/j.issn.1004-1699.2015.01.002

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AB - Mixer is a basic RF device for signal transportation and has potential applications in many fields. A novel sub-millimeter mixer device based on MEMS technology has been designed and fabricated. In this design, SU-8 photoresist which has a high dielectric constant, was used as the dielectric layer of the device. The subsequent processes, such as photolithography, electroplating of micro-strip etc., were carried out on SU-8 dielectric layer. By using positive- and negative photoresist sacrifical process, a novel sub-millimeter mixer was demonstrated.

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Design and fabrication of a sub-millimeter mixer based on MEMS technology

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Keywords

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