Design and Fabrication of a Forward View Scanner on SiOB with Latch Structure for Improved Vertical Orientation

Dingkang Wang; Dong Zheng; Sanjeev Koppal; Boqian Sun; Huikai Xie

doi:10.1109/MEMS51782.2021.9375454

Design and Fabrication of a Forward View Scanner on SiOB with Latch Structure for Improved Vertical Orientation

Dingkang Wang, Dong Zheng, Sanjeev Koppal, Boqian Sun, Huikai Xie

University of Florida

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

MEMS mirror based forward-view optical scanning typically requires a second mirror to direct the optical beam forward, which increases the size and weight of the scanner drastically. This paper reports a compact forward-view laser scanner with two vertically oriented scanning micromirrors integrated on a silicon optical bench. This concept was previously explored, but the bending angles of the vertical mirrors had large deviations (typically ±15°) from 90°. In this work, a new latch structure is proposed to secure the mirror frame at its vertical position and an array of meander thin-film stripes is proposed to ensure the latching. The new design has been successfully fabricated and shows much-improved verticality with a maximum deviation of less than ± 2° from 90°. The measured forward field of view (FoV) of the vertical micromirror reaches 20° in both axes at non-resonance with the voltage amplitude less than 3.5 V. The first-order resonant frequency of the micromirror is about 630 Hz. A forward scanning LiDAR has been built with this new MEMS scanner and 3D point clouds have been achieved.

Original language	English
Title of host publication	34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	290-293
Number of pages	4
ISBN (Electronic)	9781665419123
DOIs	https://doi.org/10.1109/MEMS51782.2021.9375454
Publication status	Published - 25 Jan 2021
Externally published	Yes
Event	34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021 - Virtual, Gainesville, United States Duration: 25 Jan 2021 → 29 Jan 2021

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume	2021-January
ISSN (Print)	1084-6999

Conference

Conference	34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021
Country/Territory	United States
City	Virtual, Gainesville
Period	25/01/21 → 29/01/21

Keywords

LiDAR
MEMS mirror
electrothermal actuation
forward-scanning

Access to Document

10.1109/MEMS51782.2021.9375454

Cite this

Wang, D., Zheng, D., Koppal, S., Sun, B., & Xie, H. (2021). Design and Fabrication of a Forward View Scanner on SiOB with Latch Structure for Improved Vertical Orientation. In 34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021 (pp. 290-293). Article 9375454 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2021-January). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMS51782.2021.9375454

Wang, Dingkang ; Zheng, Dong ; Koppal, Sanjeev et al. / Design and Fabrication of a Forward View Scanner on SiOB with Latch Structure for Improved Vertical Orientation. 34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021. Institute of Electrical and Electronics Engineers Inc., 2021. pp. 290-293 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

@inproceedings{b8fe6dd9899b4c12809d6adb5cabb788,

title = "Design and Fabrication of a Forward View Scanner on SiOB with Latch Structure for Improved Vertical Orientation",

abstract = "MEMS mirror based forward-view optical scanning typically requires a second mirror to direct the optical beam forward, which increases the size and weight of the scanner drastically. This paper reports a compact forward-view laser scanner with two vertically oriented scanning micromirrors integrated on a silicon optical bench. This concept was previously explored, but the bending angles of the vertical mirrors had large deviations (typically ±15°) from 90°. In this work, a new latch structure is proposed to secure the mirror frame at its vertical position and an array of meander thin-film stripes is proposed to ensure the latching. The new design has been successfully fabricated and shows much-improved verticality with a maximum deviation of less than ± 2° from 90°. The measured forward field of view (FoV) of the vertical micromirror reaches 20° in both axes at non-resonance with the voltage amplitude less than 3.5 V. The first-order resonant frequency of the micromirror is about 630 Hz. A forward scanning LiDAR has been built with this new MEMS scanner and 3D point clouds have been achieved.",

keywords = "LiDAR, MEMS mirror, electrothermal actuation, forward-scanning",

author = "Dingkang Wang and Dong Zheng and Sanjeev Koppal and Boqian Sun and Huikai Xie",

note = "Publisher Copyright: {\textcopyright} 2021 IEEE.; 34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021 ; Conference date: 25-01-2021 Through 29-01-2021",

year = "2021",

month = jan,

day = "25",

doi = "10.1109/MEMS51782.2021.9375454",

language = "English",

series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "290--293",

booktitle = "34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021",

address = "United States",

}

Wang, D, Zheng, D, Koppal, S, Sun, B & Xie, H 2021, Design and Fabrication of a Forward View Scanner on SiOB with Latch Structure for Improved Vertical Orientation. in 34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021., 9375454, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), vol. 2021-January, Institute of Electrical and Electronics Engineers Inc., pp. 290-293, 34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021, Virtual, Gainesville, United States, 25/01/21. https://doi.org/10.1109/MEMS51782.2021.9375454

Design and Fabrication of a Forward View Scanner on SiOB with Latch Structure for Improved Vertical Orientation. / Wang, Dingkang; Zheng, Dong; Koppal, Sanjeev et al.
34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021. Institute of Electrical and Electronics Engineers Inc., 2021. p. 290-293 9375454 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2021-January).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Design and Fabrication of a Forward View Scanner on SiOB with Latch Structure for Improved Vertical Orientation

AU - Wang, Dingkang

AU - Zheng, Dong

AU - Koppal, Sanjeev

AU - Sun, Boqian

AU - Xie, Huikai

PY - 2021/1/25

Y1 - 2021/1/25

N2 - MEMS mirror based forward-view optical scanning typically requires a second mirror to direct the optical beam forward, which increases the size and weight of the scanner drastically. This paper reports a compact forward-view laser scanner with two vertically oriented scanning micromirrors integrated on a silicon optical bench. This concept was previously explored, but the bending angles of the vertical mirrors had large deviations (typically ±15°) from 90°. In this work, a new latch structure is proposed to secure the mirror frame at its vertical position and an array of meander thin-film stripes is proposed to ensure the latching. The new design has been successfully fabricated and shows much-improved verticality with a maximum deviation of less than ± 2° from 90°. The measured forward field of view (FoV) of the vertical micromirror reaches 20° in both axes at non-resonance with the voltage amplitude less than 3.5 V. The first-order resonant frequency of the micromirror is about 630 Hz. A forward scanning LiDAR has been built with this new MEMS scanner and 3D point clouds have been achieved.

AB - MEMS mirror based forward-view optical scanning typically requires a second mirror to direct the optical beam forward, which increases the size and weight of the scanner drastically. This paper reports a compact forward-view laser scanner with two vertically oriented scanning micromirrors integrated on a silicon optical bench. This concept was previously explored, but the bending angles of the vertical mirrors had large deviations (typically ±15°) from 90°. In this work, a new latch structure is proposed to secure the mirror frame at its vertical position and an array of meander thin-film stripes is proposed to ensure the latching. The new design has been successfully fabricated and shows much-improved verticality with a maximum deviation of less than ± 2° from 90°. The measured forward field of view (FoV) of the vertical micromirror reaches 20° in both axes at non-resonance with the voltage amplitude less than 3.5 V. The first-order resonant frequency of the micromirror is about 630 Hz. A forward scanning LiDAR has been built with this new MEMS scanner and 3D point clouds have been achieved.

KW - LiDAR

KW - MEMS mirror

KW - electrothermal actuation

KW - forward-scanning

UR - http://www.scopus.com/inward/record.url?scp=85103463470&partnerID=8YFLogxK

U2 - 10.1109/MEMS51782.2021.9375454

DO - 10.1109/MEMS51782.2021.9375454

M3 - Conference contribution

AN - SCOPUS:85103463470

T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

SP - 290

EP - 293

BT - 34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021

Y2 - 25 January 2021 through 29 January 2021

ER -

Wang D, Zheng D, Koppal S, Sun B, Xie H. Design and Fabrication of a Forward View Scanner on SiOB with Latch Structure for Improved Vertical Orientation. In 34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021. Institute of Electrical and Electronics Engineers Inc. 2021. p. 290-293. 9375454. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMS51782.2021.9375454

Design and Fabrication of a Forward View Scanner on SiOB with Latch Structure for Improved Vertical Orientation

Abstract

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Keywords

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