Deep surface amorphization in silicon induced by spectrally-tuned ultrashort laser pulses

Mario Garcia-Lechuga, Noemi Casquero, Andong Wang, David Grojo, Jan Siegel

Research output: Contribution to journal › Conference article › peer-review

Original language	English
Journal	Optics InfoBase Conference Papers
Publication status	Published - 2021
Externally published	Yes
Event	2021 European Conference on Lasers and Electro-Optics, CLEO/Europe 2021 - Virtual, Online, Germany Duration: 21 Jun 2021 → 25 Jun 2021

Cite this

@article{cf72d8315cbf404aa4fffd811df8a022,

title = "Deep surface amorphization in silicon induced by spectrally-tuned ultrashort laser pulses",

author = "Mario Garcia-Lechuga and Noemi Casquero and Andong Wang and David Grojo and Jan Siegel",

year = "2021",

language = "English",

journal = "Optics InfoBase Conference Papers",

issn = "2162-2701",

note = "2021 European Conference on Lasers and Electro-Optics, CLEO/Europe 2021 ; Conference date: 21-06-2021 Through 25-06-2021",

}

TY - JOUR

T1 - Deep surface amorphization in silicon induced by spectrally-tuned ultrashort laser pulses

AU - Garcia-Lechuga, Mario

AU - Casquero, Noemi

AU - Wang, Andong

AU - Grojo, David

AU - Siegel, Jan

PY - 2021

Y1 - 2021

UR - http://www.scopus.com/inward/record.url?scp=85166464077&partnerID=8YFLogxK

M3 - Conference article

AN - SCOPUS:85166464077

SN - 2162-2701

JO - Optics InfoBase Conference Papers

JF - Optics InfoBase Conference Papers

T2 - 2021 European Conference on Lasers and Electro-Optics, CLEO/Europe 2021

Y2 - 21 June 2021 through 25 June 2021

ER -