TY - GEN
T1 - Crystal structure and optical characterizations of Titanium-doped Zinc Oxide thin films for organic photovoltaic applications
AU - Zhong, Z. Y.
AU - Wang, H.
AU - Zhang, T.
AU - Lan, C.
AU - Chen, S. B.
PY - 2013
Y1 - 2013
N2 - Thin films of transparent conducting titanium-doped zinc oxide (TZO) were deposited by radio-frequency magnetron sputtering technique using a sintered ceramic target of ZnTiO3. The structural and optical properties of the thin films were characterized with X-ray diffraction and spectrophotometer. The results show that the polycrystalline TZO thin films consist of the hexagonal crystal structures with c-axis as the preferred growth orientation normal to the substrate, and that the titanium doping level significantly affects the crystal structures and optical properties of the thin films. The TZO film deposited with the titanium content of 3 wt% has the relatively well crystallinity, the largest crystal size and the highest average visible transmittance. Furthermore, the optical constants and optical energy gaps of the thin films were determined by optical characterization method.
AB - Thin films of transparent conducting titanium-doped zinc oxide (TZO) were deposited by radio-frequency magnetron sputtering technique using a sintered ceramic target of ZnTiO3. The structural and optical properties of the thin films were characterized with X-ray diffraction and spectrophotometer. The results show that the polycrystalline TZO thin films consist of the hexagonal crystal structures with c-axis as the preferred growth orientation normal to the substrate, and that the titanium doping level significantly affects the crystal structures and optical properties of the thin films. The TZO film deposited with the titanium content of 3 wt% has the relatively well crystallinity, the largest crystal size and the highest average visible transmittance. Furthermore, the optical constants and optical energy gaps of the thin films were determined by optical characterization method.
KW - Magnetron sputtering
KW - Optical characterization
KW - Zinc oxide thin films
UR - http://www.scopus.com/inward/record.url?scp=84887394403&partnerID=8YFLogxK
U2 - 10.4028/www.scientific.net/AMR.834-836.100
DO - 10.4028/www.scientific.net/AMR.834-836.100
M3 - Conference contribution
AN - SCOPUS:84887394403
SN - 9783037859162
T3 - Advanced Materials Research
SP - 100
EP - 103
BT - Research in Materials and Manufacturing Technologies
T2 - 2013 3rd International Conference on Materials and Products Manufacturing Technology, ICMPMT 2013
Y2 - 25 September 2013 through 26 September 2013
ER -
