Controlling mid-spatial frequency errors in magnetorheological jet polishing with a simple vertical model

Tan Wang; Haobo Cheng; Hao Yang; Wentao Wu; Honyuen Tam

doi:10.1364/AO.54.006433

Controlling mid-spatial frequency errors in magnetorheological jet polishing with a simple vertical model

Tan Wang, Haobo Cheng^*, Hao Yang, Wentao Wu, Honyuen Tam

^*Corresponding author for this work

School of Optics and Photonics

Research output: Contribution to journal › Article › peer-review

25 Citations (Scopus)

Abstract

Mid-spatial frequency (MSF) errors are always produced in magnetorheological jet polishing (MJP) with a simple vertical jetting model and require a control during the process. The relation between a surface with MSF errors and power spectral density is analyzed. Based on this, various concepts and methods are developed to restrain the MSF errors in MJP. With a cut-off frequency, the appropriate removal function is adopted. In addition, a dedicated path with uniform characteristics is designed for polishing. The weighted iterative algorithm is proposed to get a continuous and effective dwell time map. The duplication ratio is utilized to increase the nonuniformity of the surface. The experiments are deployed in a MJP run. The peak-to-valley and root mean square of the surface are reduced from 0.384λ and 0.077λ (λ = 632.8 nm), respectively to 0.054λ and 0.007λ, respectively, and the smooth PSD curves are produced with low and smooth distribution.

Original language	English
Pages (from-to)	6433-6440
Number of pages	8
Journal	Applied Optics
Volume	54
Issue number	21
DOIs	https://doi.org/10.1364/AO.54.006433
Publication status	Published - 20 Jul 2015

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abstract = "Mid-spatial frequency (MSF) errors are always produced in magnetorheological jet polishing (MJP) with a simple vertical jetting model and require a control during the process. The relation between a surface with MSF errors and power spectral density is analyzed. Based on this, various concepts and methods are developed to restrain the MSF errors in MJP. With a cut-off frequency, the appropriate removal function is adopted. In addition, a dedicated path with uniform characteristics is designed for polishing. The weighted iterative algorithm is proposed to get a continuous and effective dwell time map. The duplication ratio is utilized to increase the nonuniformity of the surface. The experiments are deployed in a MJP run. The peak-to-valley and root mean square of the surface are reduced from 0.384λ and 0.077λ (λ = 632.8 nm), respectively to 0.054λ and 0.007λ, respectively, and the smooth PSD curves are produced with low and smooth distribution.",

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AU - Wang, Tan

AU - Cheng, Haobo

AU - Yang, Hao

AU - Wu, Wentao

AU - Tam, Honyuen

PY - 2015/7/20

Y1 - 2015/7/20

N2 - Mid-spatial frequency (MSF) errors are always produced in magnetorheological jet polishing (MJP) with a simple vertical jetting model and require a control during the process. The relation between a surface with MSF errors and power spectral density is analyzed. Based on this, various concepts and methods are developed to restrain the MSF errors in MJP. With a cut-off frequency, the appropriate removal function is adopted. In addition, a dedicated path with uniform characteristics is designed for polishing. The weighted iterative algorithm is proposed to get a continuous and effective dwell time map. The duplication ratio is utilized to increase the nonuniformity of the surface. The experiments are deployed in a MJP run. The peak-to-valley and root mean square of the surface are reduced from 0.384λ and 0.077λ (λ = 632.8 nm), respectively to 0.054λ and 0.007λ, respectively, and the smooth PSD curves are produced with low and smooth distribution.

AB - Mid-spatial frequency (MSF) errors are always produced in magnetorheological jet polishing (MJP) with a simple vertical jetting model and require a control during the process. The relation between a surface with MSF errors and power spectral density is analyzed. Based on this, various concepts and methods are developed to restrain the MSF errors in MJP. With a cut-off frequency, the appropriate removal function is adopted. In addition, a dedicated path with uniform characteristics is designed for polishing. The weighted iterative algorithm is proposed to get a continuous and effective dwell time map. The duplication ratio is utilized to increase the nonuniformity of the surface. The experiments are deployed in a MJP run. The peak-to-valley and root mean square of the surface are reduced from 0.384λ and 0.077λ (λ = 632.8 nm), respectively to 0.054λ and 0.007λ, respectively, and the smooth PSD curves are produced with low and smooth distribution.

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Controlling mid-spatial frequency errors in magnetorheological jet polishing with a simple vertical model

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