Confocal microendoscopic 3D imaging using MEMS scanners for both lateral and axial scans

Lin Liu, Erkang Wang, Xiaoyang Zhang, Yiqi Tang, Huikai Xie*

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

2 Citations (Scopus)

Abstract

A fiber-optic confocal microendoscope with MEMS scanners for both lateral and axial scan is presented. The MEMS 3D scan engine achieves a lateral scan range of over ± 26° with a 2D MEMS mirror and a depth scan of over 400 μm with a 1D MEMS tunable lens. Both 2D and 3D confocal images of micro-particles and acute rat brain tissue have been obtained.

Original languageEnglish
Title of host publicationIEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013
Pages1085-1088
Number of pages4
DOIs
Publication statusPublished - 2013
Externally publishedYes
EventIEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013 - Taipei, Taiwan, Province of China
Duration: 20 Jan 201324 Jan 2013

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)1084-6999

Conference

ConferenceIEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013
Country/TerritoryTaiwan, Province of China
CityTaipei
Period20/01/1324/01/13

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