CMOS MEMS accelerometer for long-term in vivo real-time small animal biological monitoring

Cheng Kuan Lu*, Hongwei Qu, Huikai Xie, Darrin J. Young

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

5 Citations (Scopus)

Abstract

A CMOS MEMS accelerometer is proposed for long term in vivo real time "free" small animal activity monitoring. The activity information along with other vital physiological signals such as blood pressure, temperature, EKG, etc. are critical for advanced biological and genetic research. The prototype sensor is designed and fabricated in a commercial 1.5 μm CMOS process, exhibiting a nominal sensing capacitance value of 540 fF with a designed sensitivity of 15 fF/g and self resonance of 3 kHz. The device occupies an area of approximately 800 μm × 700 μm and can be integrated with CMOS interface and signal processing electronics on a same chip, thus substantially reducing form factor, power dissipation, and packaging complexity of the final implantable microsystem.

Original languageEnglish
Title of host publicationProceedings of the Fourth IEEE Conference on Sensors 2005
Pages1377-1380
Number of pages4
DOIs
Publication statusPublished - 2005
Externally publishedYes
EventFourth IEEE Conference on Sensors 2005 - Irvine, CA, United States
Duration: 31 Oct 20053 Nov 2005

Publication series

NameProceedings of IEEE Sensors
Volume2005

Conference

ConferenceFourth IEEE Conference on Sensors 2005
Country/TerritoryUnited States
CityIrvine, CA
Period31/10/053/11/05

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Lu, C. K., Qu, H., Xie, H., & Young, D. J. (2005). CMOS MEMS accelerometer for long-term in vivo real-time small animal biological monitoring. In Proceedings of the Fourth IEEE Conference on Sensors 2005 (pp. 1377-1380). Article 1597965 (Proceedings of IEEE Sensors; Vol. 2005). https://doi.org/10.1109/ICSENS.2005.1597965