TY - GEN
T1 - CMOS MEMS accelerometer for long-term in vivo real-time small animal biological monitoring
AU - Lu, Cheng Kuan
AU - Qu, Hongwei
AU - Xie, Huikai
AU - Young, Darrin J.
PY - 2005
Y1 - 2005
N2 - A CMOS MEMS accelerometer is proposed for long term in vivo real time "free" small animal activity monitoring. The activity information along with other vital physiological signals such as blood pressure, temperature, EKG, etc. are critical for advanced biological and genetic research. The prototype sensor is designed and fabricated in a commercial 1.5 μm CMOS process, exhibiting a nominal sensing capacitance value of 540 fF with a designed sensitivity of 15 fF/g and self resonance of 3 kHz. The device occupies an area of approximately 800 μm × 700 μm and can be integrated with CMOS interface and signal processing electronics on a same chip, thus substantially reducing form factor, power dissipation, and packaging complexity of the final implantable microsystem.
AB - A CMOS MEMS accelerometer is proposed for long term in vivo real time "free" small animal activity monitoring. The activity information along with other vital physiological signals such as blood pressure, temperature, EKG, etc. are critical for advanced biological and genetic research. The prototype sensor is designed and fabricated in a commercial 1.5 μm CMOS process, exhibiting a nominal sensing capacitance value of 540 fF with a designed sensitivity of 15 fF/g and self resonance of 3 kHz. The device occupies an area of approximately 800 μm × 700 μm and can be integrated with CMOS interface and signal processing electronics on a same chip, thus substantially reducing form factor, power dissipation, and packaging complexity of the final implantable microsystem.
UR - http://www.scopus.com/inward/record.url?scp=33847277529&partnerID=8YFLogxK
U2 - 10.1109/ICSENS.2005.1597965
DO - 10.1109/ICSENS.2005.1597965
M3 - Conference contribution
AN - SCOPUS:33847277529
SN - 0780390563
SN - 9780780390560
T3 - Proceedings of IEEE Sensors
SP - 1377
EP - 1380
BT - Proceedings of the Fourth IEEE Conference on Sensors 2005
T2 - Fourth IEEE Conference on Sensors 2005
Y2 - 31 October 2005 through 3 November 2005
ER -