CMOS-compatible high-Q micro-electro-mechanical system suspended on-chip spiral inductor

Chong Ying Lu; Li Xin Xu; Jian Hua Li; Bo Fu; Xiu Long Ou

doi:10.3969/j.issn.1000-1093.2014.05.009

CMOS-compatible high-Q micro-electro-mechanical system suspended on-chip spiral inductor

Chong Ying Lu^*, Li Xin Xu, Jian Hua Li, Bo Fu, Xiu Long Ou

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

3 Citations (Scopus)

Abstract

A COMS-compatible high Q-factor suspended on-chip spiral inductor used in the radio frequency front-end of radio fuze is designed and fabricated using the micro-electro-mechanical system (MEMS) surface-micromachining technology. The fabrication process of inductor is compatible with CMOS in the aspects of both thermal budget and materials. The loss factors of on-chip spiral inductor are reduced by using a suspended copper coil, and the Q-factor is significantly improved. The improved inductor model is analyzed by the electromagnetic finite element analysis software HFSS. The MEMS suspended on-chip inductor is measured. The measurement results show that the Q-factor of inductor is more than 20 in the frequency range of 1~7.6 GHz and reaches 38 at 7.4 GHz.

Original language	English
Pages (from-to)	634-639
Number of pages	6
Journal	Binggong Xuebao/Acta Armamentarii
Volume	35
Issue number	5
DOIs	https://doi.org/10.3969/j.issn.1000-1093.2014.05.009
Publication status	Published - May 2014

Keywords

COMS-compatible process
Micro-electro-mechanical system
Ordnance science and technology
Q-factor
Radio fuze
Suspended on-chip spiral inductor

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10.3969/j.issn.1000-1093.2014.05.009

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title = "CMOS-compatible high-Q micro-electro-mechanical system suspended on-chip spiral inductor",

abstract = "A COMS-compatible high Q-factor suspended on-chip spiral inductor used in the radio frequency front-end of radio fuze is designed and fabricated using the micro-electro-mechanical system (MEMS) surface-micromachining technology. The fabrication process of inductor is compatible with CMOS in the aspects of both thermal budget and materials. The loss factors of on-chip spiral inductor are reduced by using a suspended copper coil, and the Q-factor is significantly improved. The improved inductor model is analyzed by the electromagnetic finite element analysis software HFSS. The MEMS suspended on-chip inductor is measured. The measurement results show that the Q-factor of inductor is more than 20 in the frequency range of 1~7.6 GHz and reaches 38 at 7.4 GHz.",

keywords = "COMS-compatible process, Micro-electro-mechanical system, Ordnance science and technology, Q-factor, Radio fuze, Suspended on-chip spiral inductor",

author = "Lu, {Chong Ying} and Xu, {Li Xin} and Li, {Jian Hua} and Bo Fu and Ou, {Xiu Long}",

year = "2014",

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doi = "10.3969/j.issn.1000-1093.2014.05.009",

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journal = "Binggong Xuebao/Acta Armamentarii",

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AU - Lu, Chong Ying

AU - Xu, Li Xin

AU - Li, Jian Hua

AU - Fu, Bo

AU - Ou, Xiu Long

PY - 2014/5

Y1 - 2014/5

N2 - A COMS-compatible high Q-factor suspended on-chip spiral inductor used in the radio frequency front-end of radio fuze is designed and fabricated using the micro-electro-mechanical system (MEMS) surface-micromachining technology. The fabrication process of inductor is compatible with CMOS in the aspects of both thermal budget and materials. The loss factors of on-chip spiral inductor are reduced by using a suspended copper coil, and the Q-factor is significantly improved. The improved inductor model is analyzed by the electromagnetic finite element analysis software HFSS. The MEMS suspended on-chip inductor is measured. The measurement results show that the Q-factor of inductor is more than 20 in the frequency range of 1~7.6 GHz and reaches 38 at 7.4 GHz.

AB - A COMS-compatible high Q-factor suspended on-chip spiral inductor used in the radio frequency front-end of radio fuze is designed and fabricated using the micro-electro-mechanical system (MEMS) surface-micromachining technology. The fabrication process of inductor is compatible with CMOS in the aspects of both thermal budget and materials. The loss factors of on-chip spiral inductor are reduced by using a suspended copper coil, and the Q-factor is significantly improved. The improved inductor model is analyzed by the electromagnetic finite element analysis software HFSS. The MEMS suspended on-chip inductor is measured. The measurement results show that the Q-factor of inductor is more than 20 in the frequency range of 1~7.6 GHz and reaches 38 at 7.4 GHz.

KW - COMS-compatible process

KW - Micro-electro-mechanical system

KW - Ordnance science and technology

KW - Q-factor

KW - Radio fuze

KW - Suspended on-chip spiral inductor

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CMOS-compatible high-Q micro-electro-mechanical system suspended on-chip spiral inductor

Abstract

Keywords

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