Characterization of high-temperature ceramic materials at microwave frequencies for MEMS applications

Xinhua Ren; Tao Jiang; Yiguang Wang; Linan An; Xun Gong

doi:10.1109/WAMICON.2009.5207277

Characterization of high-temperature ceramic materials at microwave frequencies for MEMS applications

Xinhua Ren^*, Tao Jiang, Yiguang Wang, Linan An, Xun Gong

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

10 Citations (Scopus)

Abstract

In this paper, the dielectric constant and loss tangent of two new high-temperature ceramic materials, SiCN and AIP04, are characterized using a novel measurement technique at microwave frequencies with high accuracy. These ceramic materials exhibit high thermal stabilities and corrosion resistance, enabling their use for high-temperature sensing applications. The dielectric properties of these ceramic materials are critical parameters in order to develop high-tern perature sensors for turbine engines. It is found that the dielectric constant and loss tangent of SiCN are 4.358 and 5.26 × 10 ^-3, respectively. For AlPO₄, the two parameters are 2.637 and 4.23 × 10^-3, respectively. The standard deviation is less than 0.58% for the dielectric constant measurement and less than 5.72% for the loss tangent measurement, demonstrating excellent measurement repeatability.

Original language	English
Title of host publication	2009 IEEE 10th Annual Wireless and Microwave Technology Conference, WAMICON 2009
DOIs	https://doi.org/10.1109/WAMICON.2009.5207277
Publication status	Published - 2009
Externally published	Yes
Event	2009 IEEE 10th Annual Wireless and Microwave Technology Conference, WAMICON 2009 - Clearwater, FL, United States Duration: 20 Apr 2009 → 21 Apr 2009

Publication series

Name	2009 IEEE 10th Annual Wireless and Microwave Technology Conference, WAMICON 2009

Conference

Conference	2009 IEEE 10th Annual Wireless and Microwave Technology Conference, WAMICON 2009
Country/Territory	United States
City	Clearwater, FL
Period	20/04/09 → 21/04/09

Keywords

Ceramic
Dielectric constant
High temperature
Loss tangent
Waveguide cavity

Access to Document

10.1109/WAMICON.2009.5207277

Cite this

Ren, X., Jiang, T., Wang, Y., An, L., & Gong, X. (2009). Characterization of high-temperature ceramic materials at microwave frequencies for MEMS applications. In 2009 IEEE 10th Annual Wireless and Microwave Technology Conference, WAMICON 2009 Article 5207277 (2009 IEEE 10th Annual Wireless and Microwave Technology Conference, WAMICON 2009). https://doi.org/10.1109/WAMICON.2009.5207277

@inproceedings{e71640ae600543d89519349a7420148a,

title = "Characterization of high-temperature ceramic materials at microwave frequencies for MEMS applications",

abstract = "In this paper, the dielectric constant and loss tangent of two new high-temperature ceramic materials, SiCN and AIP04, are characterized using a novel measurement technique at microwave frequencies with high accuracy. These ceramic materials exhibit high thermal stabilities and corrosion resistance, enabling their use for high-temperature sensing applications. The dielectric properties of these ceramic materials are critical parameters in order to develop high-tern perature sensors for turbine engines. It is found that the dielectric constant and loss tangent of SiCN are 4.358 and 5.26 × 10 -3, respectively. For AlPO4, the two parameters are 2.637 and 4.23 × 10-3, respectively. The standard deviation is less than 0.58% for the dielectric constant measurement and less than 5.72% for the loss tangent measurement, demonstrating excellent measurement repeatability.",

keywords = "Ceramic, Dielectric constant, High temperature, Loss tangent, Waveguide cavity",

author = "Xinhua Ren and Tao Jiang and Yiguang Wang and Linan An and Xun Gong",

year = "2009",

doi = "10.1109/WAMICON.2009.5207277",

language = "English",

isbn = "9781424445653",

series = "2009 IEEE 10th Annual Wireless and Microwave Technology Conference, WAMICON 2009",

booktitle = "2009 IEEE 10th Annual Wireless and Microwave Technology Conference, WAMICON 2009",

note = "2009 IEEE 10th Annual Wireless and Microwave Technology Conference, WAMICON 2009 ; Conference date: 20-04-2009 Through 21-04-2009",

}

Ren, X, Jiang, T, Wang, Y, An, L & Gong, X 2009, Characterization of high-temperature ceramic materials at microwave frequencies for MEMS applications. in 2009 IEEE 10th Annual Wireless and Microwave Technology Conference, WAMICON 2009., 5207277, 2009 IEEE 10th Annual Wireless and Microwave Technology Conference, WAMICON 2009, 2009 IEEE 10th Annual Wireless and Microwave Technology Conference, WAMICON 2009, Clearwater, FL, United States, 20/04/09. https://doi.org/10.1109/WAMICON.2009.5207277

Characterization of high-temperature ceramic materials at microwave frequencies for MEMS applications. / Ren, Xinhua; Jiang, Tao; Wang, Yiguang et al.
2009 IEEE 10th Annual Wireless and Microwave Technology Conference, WAMICON 2009. 2009. 5207277 (2009 IEEE 10th Annual Wireless and Microwave Technology Conference, WAMICON 2009).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Characterization of high-temperature ceramic materials at microwave frequencies for MEMS applications

AU - Ren, Xinhua

AU - Jiang, Tao

AU - Wang, Yiguang

AU - An, Linan

AU - Gong, Xun

PY - 2009

Y1 - 2009

N2 - In this paper, the dielectric constant and loss tangent of two new high-temperature ceramic materials, SiCN and AIP04, are characterized using a novel measurement technique at microwave frequencies with high accuracy. These ceramic materials exhibit high thermal stabilities and corrosion resistance, enabling their use for high-temperature sensing applications. The dielectric properties of these ceramic materials are critical parameters in order to develop high-tern perature sensors for turbine engines. It is found that the dielectric constant and loss tangent of SiCN are 4.358 and 5.26 × 10 -3, respectively. For AlPO4, the two parameters are 2.637 and 4.23 × 10-3, respectively. The standard deviation is less than 0.58% for the dielectric constant measurement and less than 5.72% for the loss tangent measurement, demonstrating excellent measurement repeatability.

AB - In this paper, the dielectric constant and loss tangent of two new high-temperature ceramic materials, SiCN and AIP04, are characterized using a novel measurement technique at microwave frequencies with high accuracy. These ceramic materials exhibit high thermal stabilities and corrosion resistance, enabling their use for high-temperature sensing applications. The dielectric properties of these ceramic materials are critical parameters in order to develop high-tern perature sensors for turbine engines. It is found that the dielectric constant and loss tangent of SiCN are 4.358 and 5.26 × 10 -3, respectively. For AlPO4, the two parameters are 2.637 and 4.23 × 10-3, respectively. The standard deviation is less than 0.58% for the dielectric constant measurement and less than 5.72% for the loss tangent measurement, demonstrating excellent measurement repeatability.

KW - Ceramic

KW - Dielectric constant

KW - High temperature

KW - Loss tangent

KW - Waveguide cavity

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U2 - 10.1109/WAMICON.2009.5207277

DO - 10.1109/WAMICON.2009.5207277

M3 - Conference contribution

AN - SCOPUS:70449393541

SN - 9781424445653

T3 - 2009 IEEE 10th Annual Wireless and Microwave Technology Conference, WAMICON 2009

BT - 2009 IEEE 10th Annual Wireless and Microwave Technology Conference, WAMICON 2009

T2 - 2009 IEEE 10th Annual Wireless and Microwave Technology Conference, WAMICON 2009

Y2 - 20 April 2009 through 21 April 2009

ER -

Characterization of high-temperature ceramic materials at microwave frequencies for MEMS applications

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