TY - GEN
T1 - Characterization of high-temperature ceramic materials at microwave frequencies for MEMS applications
AU - Ren, Xinhua
AU - Jiang, Tao
AU - Wang, Yiguang
AU - An, Linan
AU - Gong, Xun
PY - 2009
Y1 - 2009
N2 - In this paper, the dielectric constant and loss tangent of two new high-temperature ceramic materials, SiCN and AIP04, are characterized using a novel measurement technique at microwave frequencies with high accuracy. These ceramic materials exhibit high thermal stabilities and corrosion resistance, enabling their use for high-temperature sensing applications. The dielectric properties of these ceramic materials are critical parameters in order to develop high-tern perature sensors for turbine engines. It is found that the dielectric constant and loss tangent of SiCN are 4.358 and 5.26 × 10 -3, respectively. For AlPO4, the two parameters are 2.637 and 4.23 × 10-3, respectively. The standard deviation is less than 0.58% for the dielectric constant measurement and less than 5.72% for the loss tangent measurement, demonstrating excellent measurement repeatability.
AB - In this paper, the dielectric constant and loss tangent of two new high-temperature ceramic materials, SiCN and AIP04, are characterized using a novel measurement technique at microwave frequencies with high accuracy. These ceramic materials exhibit high thermal stabilities and corrosion resistance, enabling their use for high-temperature sensing applications. The dielectric properties of these ceramic materials are critical parameters in order to develop high-tern perature sensors for turbine engines. It is found that the dielectric constant and loss tangent of SiCN are 4.358 and 5.26 × 10 -3, respectively. For AlPO4, the two parameters are 2.637 and 4.23 × 10-3, respectively. The standard deviation is less than 0.58% for the dielectric constant measurement and less than 5.72% for the loss tangent measurement, demonstrating excellent measurement repeatability.
KW - Ceramic
KW - Dielectric constant
KW - High temperature
KW - Loss tangent
KW - Waveguide cavity
UR - http://www.scopus.com/inward/record.url?scp=70449393541&partnerID=8YFLogxK
U2 - 10.1109/WAMICON.2009.5207277
DO - 10.1109/WAMICON.2009.5207277
M3 - Conference contribution
AN - SCOPUS:70449393541
SN - 9781424445653
T3 - 2009 IEEE 10th Annual Wireless and Microwave Technology Conference, WAMICON 2009
BT - 2009 IEEE 10th Annual Wireless and Microwave Technology Conference, WAMICON 2009
T2 - 2009 IEEE 10th Annual Wireless and Microwave Technology Conference, WAMICON 2009
Y2 - 20 April 2009 through 21 April 2009
ER -