@inproceedings{5cc2404b018b453e953c08a4f1db4341,
title = "Characterization and reliability study of a MEMS mirror based on electrothermal bimorph actuation",
abstract = "An electrothermal bimorph based MEMS mirror with large scan range, high fill factor and high resonant frequency is presented. A reliability issue due to burn-out of a bimorph thermal actuator is also studied and modeled.",
keywords = "MEMS, Micromirror, bimorph, electrothermal actuation, reliability",
author = "Haoran Wang and Xiaoyang Zhang and Daihua Zhang and Liang Zhou and Huikai Xie",
note = "Publisher Copyright: {\textcopyright} 2017 IEEE.; 22nd International Conference on Optical MEMS and Nanophotonics, OMN 2017 ; Conference date: 13-08-2017 Through 17-08-2017",
year = "2017",
month = sep,
day = "26",
doi = "10.1109/OMN.2017.8051505",
language = "English",
series = "International Conference on Optical MEMS and Nanophotonics",
publisher = "IEEE Computer Society",
booktitle = "2017 International Conference on Optical MEMS and Nanophotonics, OMN 2017 - Proceedings",
address = "United States",
}