TY - JOUR
T1 - Centroid shift analysis of microlens array detector in interference imaging system
AU - Zhao, Zhu
AU - Hui, Mei
AU - Liu, Ming
AU - Dong, Liquan
AU - Liu, Xiaohua
AU - Zhao, Yuejin
N1 - Publisher Copyright:
© 2015 Elsevier B.V. All rights reserved.
PY - 2015/6/6
Y1 - 2015/6/6
N2 - Most CCD imaging detectors integrated microlens arrays (MLAs) to increase fill factor and sensitivity. However, they also introduce spot calibration issues with the inconsistency of spot geometry center and intensity distribution center. We setup theoretical and experimental models to research the problem of centroid shifting. According to the Seidel and Zernike coefficients of the optical model, we analyze main aberrations of microlens. In "Chief Ray" and "Centroid" reference frames, centroid shift numerical value is calculated with Geometric Ensquared Energy (GEE). Based on pentaprism test for 8.4 m mirror segment, we conduct spot imaging experiment in interference system. Spots images are obtained, and two-dimensional centroid algorithm processing is performed on them to get the analog experiment values of centroid movements. The results show that the MLA placed in KAI-16000 imaging detector causes the spot centroid to move. When there is a 14° (or -14°) angle of incident ray, the shifting values are about 1.46 μm in simulation and 2.18 μm in experiment. Our research makes a contribution to the compensation of calibrated error in metrology technology. We also prove that a significant portion of the shift comes from the low order aberration of microlens.
AB - Most CCD imaging detectors integrated microlens arrays (MLAs) to increase fill factor and sensitivity. However, they also introduce spot calibration issues with the inconsistency of spot geometry center and intensity distribution center. We setup theoretical and experimental models to research the problem of centroid shifting. According to the Seidel and Zernike coefficients of the optical model, we analyze main aberrations of microlens. In "Chief Ray" and "Centroid" reference frames, centroid shift numerical value is calculated with Geometric Ensquared Energy (GEE). Based on pentaprism test for 8.4 m mirror segment, we conduct spot imaging experiment in interference system. Spots images are obtained, and two-dimensional centroid algorithm processing is performed on them to get the analog experiment values of centroid movements. The results show that the MLA placed in KAI-16000 imaging detector causes the spot centroid to move. When there is a 14° (or -14°) angle of incident ray, the shifting values are about 1.46 μm in simulation and 2.18 μm in experiment. Our research makes a contribution to the compensation of calibrated error in metrology technology. We also prove that a significant portion of the shift comes from the low order aberration of microlens.
KW - Centroid shift
KW - Geometric Ensquared Energy
KW - Interference imaging system
KW - Low order aberration
KW - Microlens array
UR - http://www.scopus.com/inward/record.url?scp=84930628651&partnerID=8YFLogxK
U2 - 10.1016/j.optcom.2015.05.049
DO - 10.1016/j.optcom.2015.05.049
M3 - Article
AN - SCOPUS:84930628651
SN - 0030-4018
VL - 354
SP - 132
EP - 139
JO - Optics Communications
JF - Optics Communications
ER -