Cavity defects in aluminium thin films by sputtering deposition

Gang Wang; Li Xin Xu; Chong Ying Lu; Qin Han; Lin Cong

Cavity defects in aluminium thin films by sputtering deposition

Gang Wang, Li Xin Xu, Chong Ying Lu, Qin Han, Lin Cong

School of Mechatronical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

Cavity defects in sputtering deposited aluminium films are demonstrated and analyzed by experiments and a physical behavior model. The defects have shown unique features from typical contamination particles and crystalline grains in microscope images and can be identified as cavity defect generated in sputtering deposition process. Deposition experiments with different sputtering parameters and substrate materials were applied to reveal the relation between sputtering power and the defects distribution density. To interpret the experiment phenomenon, a stochastic process model of numerous free atoms behavior was constructed based on target atoms distribution in the sputtering chamber and energy exchanging effects in plasma-target collision. Analysis on the model indicated a generation principle of cavity defects and relation between defects features and sputtering power. Combine the experiment results with theoretical model analyses, and the conclusion can be deduced that, considering specified deposition thickness, cavity defects density increases with the rising of sputtering power, which implies the deposition surface quality can be improved by decreased sputtering power.

Original language	English
Title of host publication	Advances in Energy Science and Equipment Engineering - Proceedings of International Conference on Energy Equipment Science and Engineering, ICEESE 2015
Editors	Aragona Patty, Shiquan Zhou, Shiming Chen
Publisher	CRC Press/Balkema
Pages	2843-2848
Number of pages	6
ISBN (Print)	9781138029330
Publication status	Published - 2015
Event	International Conference on Energy Equipment Science and Engineering, ICEESE 2015 - Guangzhou, China Duration: 30 May 2015 → 31 May 2015

Publication series

Name	Advances in Energy Science and Equipment Engineering - Proceedings of International Conference on Energy Equipment Science and Engineering, ICEESE 2015
Volume	3

Conference

Conference	International Conference on Energy Equipment Science and Engineering, ICEESE 2015
Country/Territory	China
City	Guangzhou
Period	30/05/15 → 31/05/15

Cite this

Wang, G., Xu, L. X., Lu, C. Y., Han, Q., & Cong, L. (2015). Cavity defects in aluminium thin films by sputtering deposition. In A. Patty, S. Zhou, & S. Chen (Eds.), Advances in Energy Science and Equipment Engineering - Proceedings of International Conference on Energy Equipment Science and Engineering, ICEESE 2015 (pp. 2843-2848). (Advances in Energy Science and Equipment Engineering - Proceedings of International Conference on Energy Equipment Science and Engineering, ICEESE 2015; Vol. 3). CRC Press/Balkema.

Wang, Gang ; Xu, Li Xin ; Lu, Chong Ying et al. / Cavity defects in aluminium thin films by sputtering deposition. Advances in Energy Science and Equipment Engineering - Proceedings of International Conference on Energy Equipment Science and Engineering, ICEESE 2015. editor / Aragona Patty ; Shiquan Zhou ; Shiming Chen. CRC Press/Balkema, 2015. pp. 2843-2848 (Advances in Energy Science and Equipment Engineering - Proceedings of International Conference on Energy Equipment Science and Engineering, ICEESE 2015).

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title = "Cavity defects in aluminium thin films by sputtering deposition",

abstract = "Cavity defects in sputtering deposited aluminium films are demonstrated and analyzed by experiments and a physical behavior model. The defects have shown unique features from typical contamination particles and crystalline grains in microscope images and can be identified as cavity defect generated in sputtering deposition process. Deposition experiments with different sputtering parameters and substrate materials were applied to reveal the relation between sputtering power and the defects distribution density. To interpret the experiment phenomenon, a stochastic process model of numerous free atoms behavior was constructed based on target atoms distribution in the sputtering chamber and energy exchanging effects in plasma-target collision. Analysis on the model indicated a generation principle of cavity defects and relation between defects features and sputtering power. Combine the experiment results with theoretical model analyses, and the conclusion can be deduced that, considering specified deposition thickness, cavity defects density increases with the rising of sputtering power, which implies the deposition surface quality can be improved by decreased sputtering power.",

author = "Gang Wang and Xu, {Li Xin} and Lu, {Chong Ying} and Qin Han and Lin Cong",

note = "Publisher Copyright: {\textcopyright} 2015 Taylor & Francis Group, London.; International Conference on Energy Equipment Science and Engineering, ICEESE 2015 ; Conference date: 30-05-2015 Through 31-05-2015",

year = "2015",

language = "English",

isbn = "9781138029330",

series = "Advances in Energy Science and Equipment Engineering - Proceedings of International Conference on Energy Equipment Science and Engineering, ICEESE 2015",

publisher = "CRC Press/Balkema",

pages = "2843--2848",

editor = "Aragona Patty and Shiquan Zhou and Shiming Chen",

booktitle = "Advances in Energy Science and Equipment Engineering - Proceedings of International Conference on Energy Equipment Science and Engineering, ICEESE 2015",

}

Wang, G, Xu, LX, Lu, CY, Han, Q & Cong, L 2015, Cavity defects in aluminium thin films by sputtering deposition. in A Patty, S Zhou & S Chen (eds), Advances in Energy Science and Equipment Engineering - Proceedings of International Conference on Energy Equipment Science and Engineering, ICEESE 2015. Advances in Energy Science and Equipment Engineering - Proceedings of International Conference on Energy Equipment Science and Engineering, ICEESE 2015, vol. 3, CRC Press/Balkema, pp. 2843-2848, International Conference on Energy Equipment Science and Engineering, ICEESE 2015, Guangzhou, China, 30/05/15.

Cavity defects in aluminium thin films by sputtering deposition. / Wang, Gang; Xu, Li Xin; Lu, Chong Ying et al.
Advances in Energy Science and Equipment Engineering - Proceedings of International Conference on Energy Equipment Science and Engineering, ICEESE 2015. ed. / Aragona Patty; Shiquan Zhou; Shiming Chen. CRC Press/Balkema, 2015. p. 2843-2848 (Advances in Energy Science and Equipment Engineering - Proceedings of International Conference on Energy Equipment Science and Engineering, ICEESE 2015; Vol. 3).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Cavity defects in aluminium thin films by sputtering deposition

AU - Wang, Gang

AU - Xu, Li Xin

AU - Lu, Chong Ying

AU - Han, Qin

AU - Cong, Lin

PY - 2015

Y1 - 2015

N2 - Cavity defects in sputtering deposited aluminium films are demonstrated and analyzed by experiments and a physical behavior model. The defects have shown unique features from typical contamination particles and crystalline grains in microscope images and can be identified as cavity defect generated in sputtering deposition process. Deposition experiments with different sputtering parameters and substrate materials were applied to reveal the relation between sputtering power and the defects distribution density. To interpret the experiment phenomenon, a stochastic process model of numerous free atoms behavior was constructed based on target atoms distribution in the sputtering chamber and energy exchanging effects in plasma-target collision. Analysis on the model indicated a generation principle of cavity defects and relation between defects features and sputtering power. Combine the experiment results with theoretical model analyses, and the conclusion can be deduced that, considering specified deposition thickness, cavity defects density increases with the rising of sputtering power, which implies the deposition surface quality can be improved by decreased sputtering power.

AB - Cavity defects in sputtering deposited aluminium films are demonstrated and analyzed by experiments and a physical behavior model. The defects have shown unique features from typical contamination particles and crystalline grains in microscope images and can be identified as cavity defect generated in sputtering deposition process. Deposition experiments with different sputtering parameters and substrate materials were applied to reveal the relation between sputtering power and the defects distribution density. To interpret the experiment phenomenon, a stochastic process model of numerous free atoms behavior was constructed based on target atoms distribution in the sputtering chamber and energy exchanging effects in plasma-target collision. Analysis on the model indicated a generation principle of cavity defects and relation between defects features and sputtering power. Combine the experiment results with theoretical model analyses, and the conclusion can be deduced that, considering specified deposition thickness, cavity defects density increases with the rising of sputtering power, which implies the deposition surface quality can be improved by decreased sputtering power.

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M3 - Conference contribution

AN - SCOPUS:84973547919

SN - 9781138029330

T3 - Advances in Energy Science and Equipment Engineering - Proceedings of International Conference on Energy Equipment Science and Engineering, ICEESE 2015

SP - 2843

EP - 2848

BT - Advances in Energy Science and Equipment Engineering - Proceedings of International Conference on Energy Equipment Science and Engineering, ICEESE 2015

A2 - Patty, Aragona

A2 - Zhou, Shiquan

A2 - Chen, Shiming

PB - CRC Press/Balkema

T2 - International Conference on Energy Equipment Science and Engineering, ICEESE 2015

Y2 - 30 May 2015 through 31 May 2015

ER -

Wang G, Xu LX, Lu CY, Han Q, Cong L. Cavity defects in aluminium thin films by sputtering deposition. In Patty A, Zhou S, Chen S, editors, Advances in Energy Science and Equipment Engineering - Proceedings of International Conference on Energy Equipment Science and Engineering, ICEESE 2015. CRC Press/Balkema. 2015. p. 2843-2848. (Advances in Energy Science and Equipment Engineering - Proceedings of International Conference on Energy Equipment Science and Engineering, ICEESE 2015).

Cavity defects in aluminium thin films by sputtering deposition

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