C 1s photoemission investigation of substrate bias and annealing temperature influencing the microstructure of amorphous diamond films

J. Zhu; C. Jiang; J. Han; J. Liang

doi:10.1007/s00339-007-4094-6

C 1s photoemission investigation of substrate bias and annealing temperature influencing the microstructure of amorphous diamond films

J. Zhu^*, C. Jiang, J. Han, J. Liang

^*Corresponding author for this work

Harbin Institute of Technology

Research output: Contribution to journal › Article › peer-review

2 Citations (Scopus)

Abstract

The hybridization composition of amorphous diamond films deposited using a filtered arc has been investigated as functions of the substrate bias and the annealing temperature by the deconvolution of C 1s photoemission spectra. The chemical shift and the half width of the entire C 1s spectrum have demonstrated the clear regularities to the changing bias and temperature. The XPS C 1s core level spectra can provide a powerful way to follow the evolution of the sp ³ bonding configurations.

Original language	English
Pages (from-to)	497-501
Number of pages	5
Journal	Applied Physics A: Materials Science and Processing
Volume	89
Issue number	2
DOIs	https://doi.org/10.1007/s00339-007-4094-6
Publication status	Published - Nov 2007
Externally published	Yes

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title = "C 1s photoemission investigation of substrate bias and annealing temperature influencing the microstructure of amorphous diamond films",

abstract = "The hybridization composition of amorphous diamond films deposited using a filtered arc has been investigated as functions of the substrate bias and the annealing temperature by the deconvolution of C 1s photoemission spectra. The chemical shift and the half width of the entire C 1s spectrum have demonstrated the clear regularities to the changing bias and temperature. The XPS C 1s core level spectra can provide a powerful way to follow the evolution of the sp 3 bonding configurations.",

author = "J. Zhu and C. Jiang and J. Han and J. Liang",

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AU - Han, J.

AU - Liang, J.

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AB - The hybridization composition of amorphous diamond films deposited using a filtered arc has been investigated as functions of the substrate bias and the annealing temperature by the deconvolution of C 1s photoemission spectra. The chemical shift and the half width of the entire C 1s spectrum have demonstrated the clear regularities to the changing bias and temperature. The XPS C 1s core level spectra can provide a powerful way to follow the evolution of the sp 3 bonding configurations.

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C 1s photoemission investigation of substrate bias and annealing temperature influencing the microstructure of amorphous diamond films

Abstract

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