Burr formation mechanism of ultraprecision cutting for microgrooves on nickel phosphide in consideration of the diamond tool edge radius

Single-point diamond cutting is an efficient method to generate the V-shape microgrooves, but the burr forms easily at the microgroove edge when cutting ductile material, especially at small (micron level) cutting depth, and the burr increases with the reduction in the cutting depth. In this paper, the effects of plastic side flow in micro cutting are taken into account to explain the formation of burrs in ultraprecision machining process. The edge radius of diamond tool is measured by scanning probe microscope (SPM), and the mechanism of the burr formation is revealed with considering the edge radius of diamond tool and the cutting depth in machining nickel phosphide (Ni-P). In this way, an approach to restrain the burr formation is established so as to generate fine microgrooves.