Analysis of nonlinearities in force-to-voltage conversion in vibratory microgyroscope

Shaohua Niu*, Shiqiao Gao

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

6 Citations (Scopus)

Abstract

At present, the MEMS vibratory gyroscope is an extensively researched MEMS sensor. The vibratory gyroscope is used to measure the angular velocity of object, which is based on Coriolis effect. According to the working principle of this kind of gyroscope, the force to voltage is an important part conversion for realizing the role of the gyro. In the paper, we analyze the nonlinearities in force-to-voltage conversion, and conclude that the mechanical quadrature signal can form the limiting factor for the overall accuracy of the system.

Original languageEnglish
Title of host publication2010 International Conference on Measuring Technology and Mechatronics Automation, ICMTMA 2010
Pages551-554
Number of pages4
DOIs
Publication statusPublished - 2010
EventInternational Conference on Measuring Technology and Mechatronics Automation, ICMTMA 2010 - Changsha, China
Duration: 13 Mar 201014 Mar 2010

Publication series

Name2010 International Conference on Measuring Technology and Mechatronics Automation, ICMTMA 2010
Volume1

Conference

ConferenceInternational Conference on Measuring Technology and Mechatronics Automation, ICMTMA 2010
Country/TerritoryChina
CityChangsha
Period13/03/1014/03/10

Keywords

  • Force-to-voltage conversion
  • MEMS
  • Mechanical quadrature
  • Nonlinearities
  • Synchronous demodulation
  • Vibratory microgyroscope

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