TY - GEN
T1 - Analysis of nonlinearities in force-to-voltage conversion in vibratory microgyroscope
AU - Niu, Shaohua
AU - Gao, Shiqiao
PY - 2010
Y1 - 2010
N2 - At present, the MEMS vibratory gyroscope is an extensively researched MEMS sensor. The vibratory gyroscope is used to measure the angular velocity of object, which is based on Coriolis effect. According to the working principle of this kind of gyroscope, the force to voltage is an important part conversion for realizing the role of the gyro. In the paper, we analyze the nonlinearities in force-to-voltage conversion, and conclude that the mechanical quadrature signal can form the limiting factor for the overall accuracy of the system.
AB - At present, the MEMS vibratory gyroscope is an extensively researched MEMS sensor. The vibratory gyroscope is used to measure the angular velocity of object, which is based on Coriolis effect. According to the working principle of this kind of gyroscope, the force to voltage is an important part conversion for realizing the role of the gyro. In the paper, we analyze the nonlinearities in force-to-voltage conversion, and conclude that the mechanical quadrature signal can form the limiting factor for the overall accuracy of the system.
KW - Force-to-voltage conversion
KW - MEMS
KW - Mechanical quadrature
KW - Nonlinearities
KW - Synchronous demodulation
KW - Vibratory microgyroscope
UR - http://www.scopus.com/inward/record.url?scp=77953170860&partnerID=8YFLogxK
U2 - 10.1109/ICMTMA.2010.59
DO - 10.1109/ICMTMA.2010.59
M3 - Conference contribution
AN - SCOPUS:77953170860
SN - 9780769539621
T3 - 2010 International Conference on Measuring Technology and Mechatronics Automation, ICMTMA 2010
SP - 551
EP - 554
BT - 2010 International Conference on Measuring Technology and Mechatronics Automation, ICMTMA 2010
T2 - International Conference on Measuring Technology and Mechatronics Automation, ICMTMA 2010
Y2 - 13 March 2010 through 14 March 2010
ER -