@inproceedings{5d3409ab13c04ff4a4214abcde0adc15,
title = "Analysis of fabrication errors on micro-spring's elastic coefficient",
abstract = "Because fabrication errors have a great influence on micro-spring's elastic coefficient, and it is difficult to reduce the influence through fabrication process methods at this stage, the authors propose solutions through design process to reduce the sensitivity of Elastic coefficient of fabrication errors. The authors derived error propagation formula through multivariate function Taylor series expansion method, and made a quantitative analysis of the influence of fabrication errors, then summarized the influence rules of the size parameters on dispersibility of elastic coefficient K, finally proposed the method to degrade device performance dependent on the fabrication precision.",
keywords = "Elastic coefficient, Errors transfer function, Fabrication errors, Microdevice design",
author = "Xin Shu and Wenzhong Lou and Yue Zhao and Mingru Guo and Yue Fu and Ying Wang",
year = "2013",
doi = "10.4028/www.scientific.net/KEM.562-565.3",
language = "English",
isbn = "9783037857397",
series = "Key Engineering Materials",
publisher = "Trans Tech Publications Ltd.",
pages = "3--7",
booktitle = "Micro-Nano Technology XIV",
address = "Switzerland",
note = "14th Annual Conference and the 3rd International Conference of the Chinese Society of Micro-Nano Technology, CSMNT 2012 ; Conference date: 04-11-2012 Through 07-11-2012",
}