Analysis of fabrication errors on micro-spring's elastic coefficient

Xin Shu, Wenzhong Lou*, Yue Zhao, Mingru Guo, Yue Fu, Ying Wang

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

Because fabrication errors have a great influence on micro-spring's elastic coefficient, and it is difficult to reduce the influence through fabrication process methods at this stage, the authors propose solutions through design process to reduce the sensitivity of Elastic coefficient of fabrication errors. The authors derived error propagation formula through multivariate function Taylor series expansion method, and made a quantitative analysis of the influence of fabrication errors, then summarized the influence rules of the size parameters on dispersibility of elastic coefficient K, finally proposed the method to degrade device performance dependent on the fabrication precision.

Original languageEnglish
Title of host publicationMicro-Nano Technology XIV
PublisherTrans Tech Publications Ltd.
Pages3-7
Number of pages5
ISBN (Print)9783037857397
DOIs
Publication statusPublished - 2013
Event14th Annual Conference and the 3rd International Conference of the Chinese Society of Micro-Nano Technology, CSMNT 2012 - Hangzhou, China
Duration: 4 Nov 20127 Nov 2012

Publication series

NameKey Engineering Materials
Volume562-565
ISSN (Print)1013-9826
ISSN (Electronic)1662-9795

Conference

Conference14th Annual Conference and the 3rd International Conference of the Chinese Society of Micro-Nano Technology, CSMNT 2012
Country/TerritoryChina
CityHangzhou
Period4/11/127/11/12

Keywords

  • Elastic coefficient
  • Errors transfer function
  • Fabrication errors
  • Microdevice design

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