@inproceedings{1e9405f7b791425f953eec326bc68a77,
title = "Analysis and simulation of curved bimorph microactuators",
abstract = "Difference in strains in the two layers of a bimorph causes it to curl, thereby leading to actuation. Thermal, piezoelectric and shape-memory alloy based straight bimorph actuators that undergo out-of-plane bending have been widely reported. We propose a new class of microactuators based on curved bimorphs and report their analysis for the first time. The distinguishing feature of curved bimorphs is that out-of-plane bending and twisting deformations are coupled. Analytical expressions for the vertical deflection and bimorph twist are obtained. The analysis is validated via finite-element simulations. The center of a micromirror-plate actuated by straight bimorphs shifts significantly during actuation. A novel design based on curved bimorph is proposed in which the mirror-plate center shift is only 0.4 μm for 13.5 degrees mirror tilt.",
keywords = "Bimorph, Curved bimorph, Micromirror, Piezoelectric, SMA, Thermal",
author = "Sagnik Pal and Huikai Xie",
year = "2010",
language = "English",
isbn = "9781439834022",
series = "Nanotechnology 2010: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational - Technical Proceedings of the 2010 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2010",
pages = "685--688",
booktitle = "Nanotechnology 2010",
note = "Nanotechnology 2010: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational - 2010 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2010 ; Conference date: 21-06-2010 Through 24-06-2010",
}