TY - GEN
T1 - Analysis and design of stiffness of the elastic beam in linear vibration MEMS gyroscope
AU - Niu, Shaohua
AU - Gao, Shiqiao
AU - Liu, Haipeng
PY - 2010
Y1 - 2010
N2 - At present, the linear vibration gyroscope is a major research of micro-mechanical gyroscopes. According to the working principle of the linear vibration gyro, in order to enhance its sensitivity, it is demanded that its driven model natural frequency and detection model natural frequency should be close. Thus, according to the gyroscope structure, it is required that the stiffness coefficients of the two models should be into a certain proportion. The stiffness coefficients of the models are mainly decided by the rigidity of the elastic beam, therefore, the design of stiffness of the elastic beam will directly affect the gyro performance. In this paper, the analytical formula for calculating the stiffness of the elastic beam, which is commonly used in linear vibration MEMS gyro, is derived by using the energy method. Then the elastic beams are designed based on the formula, and the design is reasonable verified by simulation and experimental comparison.
AB - At present, the linear vibration gyroscope is a major research of micro-mechanical gyroscopes. According to the working principle of the linear vibration gyro, in order to enhance its sensitivity, it is demanded that its driven model natural frequency and detection model natural frequency should be close. Thus, according to the gyroscope structure, it is required that the stiffness coefficients of the two models should be into a certain proportion. The stiffness coefficients of the models are mainly decided by the rigidity of the elastic beam, therefore, the design of stiffness of the elastic beam will directly affect the gyro performance. In this paper, the analytical formula for calculating the stiffness of the elastic beam, which is commonly used in linear vibration MEMS gyro, is derived by using the energy method. Then the elastic beams are designed based on the formula, and the design is reasonable verified by simulation and experimental comparison.
KW - Elastic beam
KW - Energy method
KW - MEMS
KW - Micro-mechanical gyroscope
KW - Stiffness
UR - http://www.scopus.com/inward/record.url?scp=77953142717&partnerID=8YFLogxK
U2 - 10.1109/ICMTMA.2010.55
DO - 10.1109/ICMTMA.2010.55
M3 - Conference contribution
AN - SCOPUS:77953142717
SN - 9780769539621
T3 - 2010 International Conference on Measuring Technology and Mechatronics Automation, ICMTMA 2010
SP - 535
EP - 538
BT - 2010 International Conference on Measuring Technology and Mechatronics Automation, ICMTMA 2010
T2 - International Conference on Measuring Technology and Mechatronics Automation, ICMTMA 2010
Y2 - 13 March 2010 through 14 March 2010
ER -