Abstract
This paper reports the design, fabrication and operation of a two-dimensional (2-D) micromirror that can generate large bi-directional scans at low actuation voltages. The micromirror device has been fabricated by using a unique DRIE CMOS-MEMS process that can simultaneously provide thin-film and single-crystal silicon microstructures. A fabricated micromirror has negligible initial tilt angle, and can perform large bi-directional 2-D optical scans (over ±30°) at less than 12 Vdc. 2-D scanning using this mirror has been demonstrated by obtaining a 14° by 50° angular raster scan pattern.
Original language | English |
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Title of host publication | TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers |
Pages | 988-991 |
Number of pages | 4 |
Publication status | Published - 2005 |
Externally published | Yes |
Event | 13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05 - Seoul, Korea, Republic of Duration: 5 Jun 2005 → 9 Jun 2005 |
Publication series
Name | Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05 |
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Volume | 1 |
Conference
Conference | 13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05 |
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Country/Territory | Korea, Republic of |
City | Seoul |
Period | 5/06/05 → 9/06/05 |
Keywords
- Bi-directional scanning
- Large rotation angle
- Optical scanner
- Two-dimensional (2-D) mirror
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Jain, A., & Xie, H. (2005). An electrothermal SCS micromirror for large Bi-directional 2-D scanning. In TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers (pp. 988-991). Article 2E4.134 (Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05; Vol. 1).