@inproceedings{3747f9b094c84bb4b9faf33d9ba1de7c,
title = "An agile tip-tilt-piston micromirror with large aperture, large scanning range and low driving voltage",
abstract = "This paper presents the design, fabrication and test results of an electrothermally-actuated tip-tilt-piston micromirror with a large optical aperture size of 1 mm. The mirror has a mechanical rotation angle of ±6° about both x-and y-axis and displaces 141 μm in z-axis all at dc voltages of less than 6 V. Dynamic test of the micromirror shows the electrothermal response time of each actuator is about 20 ms. The resonant frequencies of the piston and rotation motion are 664 Hz and 714 Hz, respectively. The large tip-tilt-piston scanning capability at low driving voltage makes this type of devices suitable for biomedical imaging and laser beam steering applications.",
author = "Kemiao Jia and Sagnik Pal and Huikai Xie",
note = "Publisher Copyright: {\textcopyright} 2008 TRF.; 2008 Solid-State Sensors, Actuators, and Microsystems Workshop ; Conference date: 01-06-2008 Through 05-06-2008",
year = "2008",
doi = "10.31438/trf.hh2008.74",
language = "English",
series = "Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop",
publisher = "Transducer Research Foundation",
pages = "284--287",
editor = "Turner, {Kimberly L.} and Leland Spangler",
booktitle = "2008 Solid-State Sensors, Actuators, and Microsystems Workshop",
}