A wireless dual-mode micro thermal flow sensor system with extended flow range by using CMOS-MEMS process

Wei Xu; Beiqi Lijin; Mingzheng Duan; Xiaoyi Wang; Jeffry Wicaksana; A. Min; Moaaz Ahmed; Ruijin Wang; Nicholas Xuanlai Fang; Amine Bermak; Yi Kuen Lee

doi:10.1109/MEMSYS.2018.8346682

A wireless dual-mode micro thermal flow sensor system with extended flow range by using CMOS-MEMS process

Wei Xu, Beiqi Lijin, Mingzheng Duan, Xiaoyi Wang, Jeffry Wicaksana, A. Min, Moaaz Ahmed, Ruijin Wang, Nicholas Xuanlai Fang, Amine Bermak, Yi Kuen Lee^*

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

20 Citations (Scopus)

Abstract

In this paper, we report a wireless dual-mode micro thermal flow (DMTF) sensor system with the extended flow range by using InvenSense 0.18μm CMOS MEMS technology. For the N₂ gas flow, the DMTF sensor gains a flow range of 0∼73m/s, which is 2.4 times larger than that of calorimetric flow sensor (0∼31m/s) setup. Besides, the calibrated DMTF sensor system shows an accuracy of less than 2% with the wireless monitoring capability. Therefore, this low-cost wireless DMTF sensor system will be a promising IoT (Internet of Things) device for the smart energy-efficient buildings application.

Original language	English
Title of host publication	2018 IEEE Micro Electro Mechanical Systems, MEMS 2018
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	824-827
Number of pages	4
ISBN (Electronic)	9781538647820
DOIs	https://doi.org/10.1109/MEMSYS.2018.8346682
Publication status	Published - 24 Apr 2018
Externally published	Yes
Event	31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018 - Belfast, United Kingdom Duration: 21 Jan 2018 → 25 Jan 2018

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume	2018-January
ISSN (Print)	1084-6999

Conference

Conference	31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018
Country/Territory	United Kingdom
City	Belfast
Period	21/01/18 → 25/01/18

Access to Document

10.1109/MEMSYS.2018.8346682

Cite this

Xu, W., Lijin, B., Duan, M., Wang, X., Wicaksana, J., Min, A., Ahmed, M., Wang, R., Fang, N. X., Bermak, A., & Lee, Y. K. (2018). A wireless dual-mode micro thermal flow sensor system with extended flow range by using CMOS-MEMS process. In 2018 IEEE Micro Electro Mechanical Systems, MEMS 2018 (pp. 824-827). (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2018-January). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2018.8346682

Xu, Wei ; Lijin, Beiqi ; Duan, Mingzheng et al. / A wireless dual-mode micro thermal flow sensor system with extended flow range by using CMOS-MEMS process. 2018 IEEE Micro Electro Mechanical Systems, MEMS 2018. Institute of Electrical and Electronics Engineers Inc., 2018. pp. 824-827 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

@inproceedings{362de4ce453e4bf2ad9ef00276e73d0c,

title = "A wireless dual-mode micro thermal flow sensor system with extended flow range by using CMOS-MEMS process",

abstract = "In this paper, we report a wireless dual-mode micro thermal flow (DMTF) sensor system with the extended flow range by using InvenSense 0.18μm CMOS MEMS technology. For the N2 gas flow, the DMTF sensor gains a flow range of 0∼73m/s, which is 2.4 times larger than that of calorimetric flow sensor (0∼31m/s) setup. Besides, the calibrated DMTF sensor system shows an accuracy of less than 2% with the wireless monitoring capability. Therefore, this low-cost wireless DMTF sensor system will be a promising IoT (Internet of Things) device for the smart energy-efficient buildings application.",

author = "Wei Xu and Beiqi Lijin and Mingzheng Duan and Xiaoyi Wang and Jeffry Wicaksana and A. Min and Moaaz Ahmed and Ruijin Wang and Fang, {Nicholas Xuanlai} and Amine Bermak and Lee, {Yi Kuen}",

note = "Publisher Copyright: {\textcopyright} 2018 IEEE.; 31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018 ; Conference date: 21-01-2018 Through 25-01-2018",

year = "2018",

month = apr,

day = "24",

doi = "10.1109/MEMSYS.2018.8346682",

language = "English",

series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "824--827",

booktitle = "2018 IEEE Micro Electro Mechanical Systems, MEMS 2018",

address = "United States",

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Xu, W, Lijin, B, Duan, M, Wang, X, Wicaksana, J, Min, A, Ahmed, M, Wang, R, Fang, NX, Bermak, A & Lee, YK 2018, A wireless dual-mode micro thermal flow sensor system with extended flow range by using CMOS-MEMS process. in 2018 IEEE Micro Electro Mechanical Systems, MEMS 2018. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), vol. 2018-January, Institute of Electrical and Electronics Engineers Inc., pp. 824-827, 31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018, Belfast, United Kingdom, 21/01/18. https://doi.org/10.1109/MEMSYS.2018.8346682

A wireless dual-mode micro thermal flow sensor system with extended flow range by using CMOS-MEMS process. / Xu, Wei; Lijin, Beiqi; Duan, Mingzheng et al.
2018 IEEE Micro Electro Mechanical Systems, MEMS 2018. Institute of Electrical and Electronics Engineers Inc., 2018. p. 824-827 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2018-January).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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AU - Xu, Wei

AU - Lijin, Beiqi

AU - Duan, Mingzheng

AU - Wang, Xiaoyi

AU - Wicaksana, Jeffry

AU - Min, A.

AU - Ahmed, Moaaz

AU - Wang, Ruijin

AU - Fang, Nicholas Xuanlai

AU - Bermak, Amine

AU - Lee, Yi Kuen

PY - 2018/4/24

Y1 - 2018/4/24

N2 - In this paper, we report a wireless dual-mode micro thermal flow (DMTF) sensor system with the extended flow range by using InvenSense 0.18μm CMOS MEMS technology. For the N2 gas flow, the DMTF sensor gains a flow range of 0∼73m/s, which is 2.4 times larger than that of calorimetric flow sensor (0∼31m/s) setup. Besides, the calibrated DMTF sensor system shows an accuracy of less than 2% with the wireless monitoring capability. Therefore, this low-cost wireless DMTF sensor system will be a promising IoT (Internet of Things) device for the smart energy-efficient buildings application.

AB - In this paper, we report a wireless dual-mode micro thermal flow (DMTF) sensor system with the extended flow range by using InvenSense 0.18μm CMOS MEMS technology. For the N2 gas flow, the DMTF sensor gains a flow range of 0∼73m/s, which is 2.4 times larger than that of calorimetric flow sensor (0∼31m/s) setup. Besides, the calibrated DMTF sensor system shows an accuracy of less than 2% with the wireless monitoring capability. Therefore, this low-cost wireless DMTF sensor system will be a promising IoT (Internet of Things) device for the smart energy-efficient buildings application.

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Xu W, Lijin B, Duan M, Wang X, Wicaksana J, Min A et al. A wireless dual-mode micro thermal flow sensor system with extended flow range by using CMOS-MEMS process. In 2018 IEEE Micro Electro Mechanical Systems, MEMS 2018. Institute of Electrical and Electronics Engineers Inc. 2018. p. 824-827. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMSYS.2018.8346682

A wireless dual-mode micro thermal flow sensor system with extended flow range by using CMOS-MEMS process

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