A wide-angle immersed MEMS mirror and its application in optical coherence tomography

Xiaoyang Zhang, Liang Zhou, Can Duan, Dong Zheng, Sanjeev Koppal, Quentin Tanguy, Huikai Xie

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

4 Citations (Scopus)

Abstract

In this paper we report a wide-angle two-axis electrothermal MEMS scanning mirror and its application in optical coherence tomography (OCT). The wide-angle scanning was achieved by combining the large scan range of the MEMS mirror and the 'Snell's Window' effect. By immersing the electrothermal MEMS mirror into a mineral oil, the original 32° field of view (FOV) can be increased up to about 75°. The wide-angle immersed mirror was employed in an OCT system and 3D OCT images were successfully obtained.

Original languageEnglish
Title of host publication2016 International Conference on Optical MEMS and Nanophotonics, OMN 2016 - Proceedings
PublisherIEEE Computer Society
ISBN (Electronic)9781509010356
DOIs
Publication statusPublished - 13 Sept 2016
Externally publishedYes
Event21st International Conference on Optical MEMS and Nanophotonics, OMN 2016 - Singapore, Singapore
Duration: 31 Jul 20164 Aug 2016

Publication series

NameInternational Conference on Optical MEMS and Nanophotonics
Volume2016-September
ISSN (Print)2160-5033
ISSN (Electronic)2160-5041

Conference

Conference21st International Conference on Optical MEMS and Nanophotonics, OMN 2016
Country/TerritorySingapore
CitySingapore
Period31/07/164/08/16

Keywords

  • MEMS in liquid
  • MEMS mirror
  • OCT
  • electrothermal bimorph
  • wide angle

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