Abstract
A novel type of variable resistor micro system based on electro-explosion is described and its performance test results are presented. The variable resistor consists of four metallic leads in parallel with different width and length thus different resistances and four one-time shot MEMS solid on-off switches [2-4]. By killing off the metallic lines, the variable resistor varies its resistance. Switching is accomplished by a voltage pulse. The resistor can be driven by external signal and its predicted lifetime is very long. Besides, the resistor has no movable parts, therefore the resistor can be used for long term store systems and harsh environments.
| Original language | English |
|---|---|
| Pages (from-to) | 865-868 |
| Number of pages | 4 |
| Journal | Key Engineering Materials |
| Volume | 645 |
| DOIs | |
| Publication status | Published - 1 May 2015 |
Keywords
- MEMS
- Metal bridge
- Micro/Nano systems
- Variable resistor