A valve-less PZT micropump with isosceles triangle cross-section diffuser elements

Chengjun Qiu; Quanliang Zhao; Huijun Zhang; Wei Qu; Hongmei Liu; Maosheng Cao

doi:10.1109/NEMS.2006.334686

A valve-less PZT micropump with isosceles triangle cross-section diffuser elements

Chengjun Qiu^*, Quanliang Zhao, Huijun Zhang, Wei Qu, Hongmei Liu, Maosheng Cao

^*Corresponding author for this work

School of Material Science and Engineering

Heilongjiang University

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

4 Citations (Scopus)

Abstract

A valve-less micropump with isosceles triangle crosssection nozzle-diffuser elements driven by PZT (Pb(Zr,Ti)O₃) patch had been successfully fabricated by MEMS (mciroelectromechanical system) technologies. As flow rectifying elements, the nozzle-diffuser is in substitute of active check valve. Although the volume flow rate characteristics of conical, pyramidal, and flat-wall nozzle-diffuser have been discussed, the isosceles triangle cross-section nozzle-diffuser elements have not been reported. The design and fabrication processes were demonstrated and volume flow rate as a function of an applied voltage were presented by experiment. The volume flow rate of micropump increased linearly with increasing the voltage applied. The numeration result of computer volume flow rate varied with pressure drop and the volume flow rate varied with pressure loss coefficients was also given. The maximum volume flow rate is 12.2μL/min and the backpressure is 578Pa when applying a 250V square driving voltage at 8000 Hz.

Original language	English
Title of host publication	Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS
Pages	200-203
Number of pages	4
DOIs	https://doi.org/10.1109/NEMS.2006.334686
Publication status	Published - 2006
Event	1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS - Zhuhai, China Duration: 18 Jan 2006 → 21 Jan 2006

Publication series

Name	Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS

Conference

Conference	1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS
Country/Territory	China
City	Zhuhai
Period	18/01/06 → 21/01/06

Keywords

Diffuser
Micropump
PZT
Volume flow rate

Access to Document

10.1109/NEMS.2006.334686

Cite this

Qiu, C., Zhao, Q., Zhang, H., Qu, W., Liu, H., & Cao, M. (2006). A valve-less PZT micropump with isosceles triangle cross-section diffuser elements. In Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS (pp. 200-203). Article 4134934 (Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS). https://doi.org/10.1109/NEMS.2006.334686

Qiu, Chengjun ; Zhao, Quanliang ; Zhang, Huijun et al. / A valve-less PZT micropump with isosceles triangle cross-section diffuser elements. Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS. 2006. pp. 200-203 (Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS).

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title = "A valve-less PZT micropump with isosceles triangle cross-section diffuser elements",

abstract = "A valve-less micropump with isosceles triangle crosssection nozzle-diffuser elements driven by PZT (Pb(Zr,Ti)O3) patch had been successfully fabricated by MEMS (mciroelectromechanical system) technologies. As flow rectifying elements, the nozzle-diffuser is in substitute of active check valve. Although the volume flow rate characteristics of conical, pyramidal, and flat-wall nozzle-diffuser have been discussed, the isosceles triangle cross-section nozzle-diffuser elements have not been reported. The design and fabrication processes were demonstrated and volume flow rate as a function of an applied voltage were presented by experiment. The volume flow rate of micropump increased linearly with increasing the voltage applied. The numeration result of computer volume flow rate varied with pressure drop and the volume flow rate varied with pressure loss coefficients was also given. The maximum volume flow rate is 12.2μL/min and the backpressure is 578Pa when applying a 250V square driving voltage at 8000 Hz.",

keywords = "Diffuser, Micropump, PZT, Volume flow rate",

author = "Chengjun Qiu and Quanliang Zhao and Huijun Zhang and Wei Qu and Hongmei Liu and Maosheng Cao",

year = "2006",

doi = "10.1109/NEMS.2006.334686",

language = "English",

isbn = "1424401402",

series = "Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS",

pages = "200--203",

booktitle = "Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS",

note = "1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS ; Conference date: 18-01-2006 Through 21-01-2006",

}

Qiu, C, Zhao, Q, Zhang, H, Qu, W, Liu, H & Cao, M 2006, A valve-less PZT micropump with isosceles triangle cross-section diffuser elements. in Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS., 4134934, Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS, pp. 200-203, 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS, Zhuhai, China, 18/01/06. https://doi.org/10.1109/NEMS.2006.334686

A valve-less PZT micropump with isosceles triangle cross-section diffuser elements. / Qiu, Chengjun; Zhao, Quanliang; Zhang, Huijun et al.
Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS. 2006. p. 200-203 4134934 (Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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AU - Qiu, Chengjun

AU - Zhao, Quanliang

AU - Zhang, Huijun

AU - Qu, Wei

AU - Liu, Hongmei

AU - Cao, Maosheng

PY - 2006

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N2 - A valve-less micropump with isosceles triangle crosssection nozzle-diffuser elements driven by PZT (Pb(Zr,Ti)O3) patch had been successfully fabricated by MEMS (mciroelectromechanical system) technologies. As flow rectifying elements, the nozzle-diffuser is in substitute of active check valve. Although the volume flow rate characteristics of conical, pyramidal, and flat-wall nozzle-diffuser have been discussed, the isosceles triangle cross-section nozzle-diffuser elements have not been reported. The design and fabrication processes were demonstrated and volume flow rate as a function of an applied voltage were presented by experiment. The volume flow rate of micropump increased linearly with increasing the voltage applied. The numeration result of computer volume flow rate varied with pressure drop and the volume flow rate varied with pressure loss coefficients was also given. The maximum volume flow rate is 12.2μL/min and the backpressure is 578Pa when applying a 250V square driving voltage at 8000 Hz.

AB - A valve-less micropump with isosceles triangle crosssection nozzle-diffuser elements driven by PZT (Pb(Zr,Ti)O3) patch had been successfully fabricated by MEMS (mciroelectromechanical system) technologies. As flow rectifying elements, the nozzle-diffuser is in substitute of active check valve. Although the volume flow rate characteristics of conical, pyramidal, and flat-wall nozzle-diffuser have been discussed, the isosceles triangle cross-section nozzle-diffuser elements have not been reported. The design and fabrication processes were demonstrated and volume flow rate as a function of an applied voltage were presented by experiment. The volume flow rate of micropump increased linearly with increasing the voltage applied. The numeration result of computer volume flow rate varied with pressure drop and the volume flow rate varied with pressure loss coefficients was also given. The maximum volume flow rate is 12.2μL/min and the backpressure is 578Pa when applying a 250V square driving voltage at 8000 Hz.

KW - Diffuser

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KW - PZT

KW - Volume flow rate

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M3 - Conference contribution

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SN - 1424401402

SN - 9781424401406

T3 - Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS

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BT - Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS

T2 - 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS

Y2 - 18 January 2006 through 21 January 2006

ER -

Qiu C, Zhao Q, Zhang H, Qu W, Liu H, Cao M. A valve-less PZT micropump with isosceles triangle cross-section diffuser elements. In Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS. 2006. p. 200-203. 4134934. (Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS). doi: 10.1109/NEMS.2006.334686

A valve-less PZT micropump with isosceles triangle cross-section diffuser elements

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