A two-axis electrothermal SCS micromirror for biomedical imaging

A. Jain; Tuqiang Xie; Yingtian Pan; G. K. Fedder; Huikai Xie

doi:10.1109/OMEMS.2003.1233444

A two-axis electrothermal SCS micromirror for biomedical imaging

A. Jain, Tuqiang Xie, Yingtian Pan, G. K. Fedder, Huikai Xie

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

3 Citations (Scopus)

Abstract

This paper reports a 1 mm², two-axis, single-crystalline-silicon (SCS)-based aluminum-coated micromirror with large scanning angle (up to 40°), which can be used for biomedical imaging. The micromirror is fabricated by a deep-reactive-ion-etch post-CMOS micromachining process.

Original language	English
Title of host publication	2003 IEEE/LEOS International Conference on Optical MEMS
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	14-15
Number of pages	2
ISBN (Electronic)	078037830X, 9780780378308
DOIs	https://doi.org/10.1109/OMEMS.2003.1233444
Publication status	Published - 2003
Externally published	Yes
Event	2003 IEEE/LEOS International Conference on Optical MEMS - Waikoloa, United States Duration: 18 Aug 2003 → 21 Aug 2003

Publication series

Name	2003 IEEE/LEOS International Conference on Optical MEMS

Conference

Conference	2003 IEEE/LEOS International Conference on Optical MEMS
Country/Territory	United States
City	Waikoloa
Period	18/08/03 → 21/08/03

Keywords

Actuators
Biomedical engineering
Biomedical imaging
Biomedical optical imaging
Electrothermal effects
Etching
Micromirrors
Microstructure
Mirrors
Substrates

Access to Document

10.1109/OMEMS.2003.1233444

Cite this

Jain, A., Xie, T., Pan, Y., Fedder, G. K., & Xie, H. (2003). A two-axis electrothermal SCS micromirror for biomedical imaging. In 2003 IEEE/LEOS International Conference on Optical MEMS (pp. 14-15). Article 1233444 (2003 IEEE/LEOS International Conference on Optical MEMS). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/OMEMS.2003.1233444

@inproceedings{9e31891929be4acb95f993320423a02c,

title = "A two-axis electrothermal SCS micromirror for biomedical imaging",

abstract = "This paper reports a 1 mm2, two-axis, single-crystalline-silicon (SCS)-based aluminum-coated micromirror with large scanning angle (up to 40°), which can be used for biomedical imaging. The micromirror is fabricated by a deep-reactive-ion-etch post-CMOS micromachining process.",

keywords = "Actuators, Biomedical engineering, Biomedical imaging, Biomedical optical imaging, Electrothermal effects, Etching, Micromirrors, Microstructure, Mirrors, Substrates",

author = "A. Jain and Tuqiang Xie and Yingtian Pan and Fedder, {G. K.} and Huikai Xie",

note = "Publisher Copyright: {\textcopyright} 2003 IEEE.; 2003 IEEE/LEOS International Conference on Optical MEMS ; Conference date: 18-08-2003 Through 21-08-2003",

year = "2003",

doi = "10.1109/OMEMS.2003.1233444",

language = "English",

series = "2003 IEEE/LEOS International Conference on Optical MEMS",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "14--15",

booktitle = "2003 IEEE/LEOS International Conference on Optical MEMS",

address = "United States",

}

Jain, A, Xie, T, Pan, Y, Fedder, GK & Xie, H 2003, A two-axis electrothermal SCS micromirror for biomedical imaging. in 2003 IEEE/LEOS International Conference on Optical MEMS., 1233444, 2003 IEEE/LEOS International Conference on Optical MEMS, Institute of Electrical and Electronics Engineers Inc., pp. 14-15, 2003 IEEE/LEOS International Conference on Optical MEMS, Waikoloa, United States, 18/08/03. https://doi.org/10.1109/OMEMS.2003.1233444

A two-axis electrothermal SCS micromirror for biomedical imaging. / Jain, A.; Xie, Tuqiang; Pan, Yingtian et al.
2003 IEEE/LEOS International Conference on Optical MEMS. Institute of Electrical and Electronics Engineers Inc., 2003. p. 14-15 1233444 (2003 IEEE/LEOS International Conference on Optical MEMS).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - A two-axis electrothermal SCS micromirror for biomedical imaging

AU - Jain, A.

AU - Xie, Tuqiang

AU - Pan, Yingtian

AU - Fedder, G. K.

AU - Xie, Huikai

PY - 2003

Y1 - 2003

N2 - This paper reports a 1 mm2, two-axis, single-crystalline-silicon (SCS)-based aluminum-coated micromirror with large scanning angle (up to 40°), which can be used for biomedical imaging. The micromirror is fabricated by a deep-reactive-ion-etch post-CMOS micromachining process.

AB - This paper reports a 1 mm2, two-axis, single-crystalline-silicon (SCS)-based aluminum-coated micromirror with large scanning angle (up to 40°), which can be used for biomedical imaging. The micromirror is fabricated by a deep-reactive-ion-etch post-CMOS micromachining process.

KW - Actuators

KW - Biomedical engineering

KW - Biomedical imaging

KW - Biomedical optical imaging

KW - Electrothermal effects

KW - Etching

KW - Micromirrors

KW - Microstructure

KW - Mirrors

KW - Substrates

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U2 - 10.1109/OMEMS.2003.1233444

DO - 10.1109/OMEMS.2003.1233444

M3 - Conference contribution

AN - SCOPUS:84929872491

T3 - 2003 IEEE/LEOS International Conference on Optical MEMS

SP - 14

EP - 15

BT - 2003 IEEE/LEOS International Conference on Optical MEMS

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 2003 IEEE/LEOS International Conference on Optical MEMS

Y2 - 18 August 2003 through 21 August 2003

ER -

A two-axis electrothermal SCS micromirror for biomedical imaging

Abstract

Publication series

Conference

Keywords

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