A tip-tilt-piston piezoelectric scanning micromirror with folded PZT unimorph actuators

W. Liao; W. Liu; J. E. Rogers; Y. Tang; B. P. Wang; H. Xie

doi:10.1109/Transducers.2013.6626819

A tip-tilt-piston piezoelectric scanning micromirror with folded PZT unimorph actuators

W. Liao, W. Liu, J. E. Rogers, Y. Tang, B. P. Wang, H. Xie

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

9 Citations (Scopus)

Abstract

This paper presents the design, fabrication and characterization of a novel tip-tilt-piston (TTP) scanning micromirror actuated by an array of folded piezoelectric unimorph actuators. The micromirror can perform rotational scanning around two in-plane orthogonal axes as well as out-of-plane piston motion The measured resonant frequencies are 112Hz (piston), 346Hz (along x-axis rotation), 1.38kHz (along y-axis rotation) and 4.87kHz (torsional rotation), respectively. The chip size is 4.3mm×2.5mm and the mirror plate is 1.0mm×1.5mm.

Original language	English
Title of host publication	2013 Transducers and Eurosensors XXVII
Subtitle of host publication	The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013
Pages	526-529
Number of pages	4
DOIs	https://doi.org/10.1109/Transducers.2013.6626819
Publication status	Published - 2013
Externally published	Yes
Event	2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013 - Barcelona, Spain Duration: 16 Jun 2013 → 20 Jun 2013

Publication series

Name	2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013

Conference

Conference	2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013
Country/Territory	Spain
City	Barcelona
Period	16/06/13 → 20/06/13

Keywords

MEMS
Micromirror
PZT
PZT Actuators
Piezoelectric
Resonance Scanning
TTP

Access to Document

10.1109/Transducers.2013.6626819

Cite this

Liao, W., Liu, W., Rogers, J. E., Tang, Y., Wang, B. P., & Xie, H. (2013). A tip-tilt-piston piezoelectric scanning micromirror with folded PZT unimorph actuators. In 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013 (pp. 526-529). Article 6626819 (2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013). https://doi.org/10.1109/Transducers.2013.6626819

Liao, W. ; Liu, W. ; Rogers, J. E. et al. / A tip-tilt-piston piezoelectric scanning micromirror with folded PZT unimorph actuators. 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013. 2013. pp. 526-529 (2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013).

@inproceedings{6c140754723740ffa50032f17dd27762,

title = "A tip-tilt-piston piezoelectric scanning micromirror with folded PZT unimorph actuators",

abstract = "This paper presents the design, fabrication and characterization of a novel tip-tilt-piston (TTP) scanning micromirror actuated by an array of folded piezoelectric unimorph actuators. The micromirror can perform rotational scanning around two in-plane orthogonal axes as well as out-of-plane piston motion The measured resonant frequencies are 112Hz (piston), 346Hz (along x-axis rotation), 1.38kHz (along y-axis rotation) and 4.87kHz (torsional rotation), respectively. The chip size is 4.3mm×2.5mm and the mirror plate is 1.0mm×1.5mm.",

keywords = "MEMS, Micromirror, PZT, PZT Actuators, Piezoelectric, Resonance Scanning, TTP",

author = "W. Liao and W. Liu and Rogers, {J. E.} and Y. Tang and Wang, {B. P.} and H. Xie",

year = "2013",

doi = "10.1109/Transducers.2013.6626819",

language = "English",

isbn = "9781467359818",

series = "2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013",

pages = "526--529",

booktitle = "2013 Transducers and Eurosensors XXVII",

note = "2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013 ; Conference date: 16-06-2013 Through 20-06-2013",

}

Liao, W, Liu, W, Rogers, JE, Tang, Y, Wang, BP & Xie, H 2013, A tip-tilt-piston piezoelectric scanning micromirror with folded PZT unimorph actuators. in 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013., 6626819, 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013, pp. 526-529, 2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013, Barcelona, Spain, 16/06/13. https://doi.org/10.1109/Transducers.2013.6626819

A tip-tilt-piston piezoelectric scanning micromirror with folded PZT unimorph actuators. / Liao, W.; Liu, W.; Rogers, J. E. et al.
2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013. 2013. p. 526-529 6626819 (2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - A tip-tilt-piston piezoelectric scanning micromirror with folded PZT unimorph actuators

AU - Liao, W.

AU - Liu, W.

AU - Rogers, J. E.

AU - Tang, Y.

AU - Wang, B. P.

AU - Xie, H.

PY - 2013

Y1 - 2013

N2 - This paper presents the design, fabrication and characterization of a novel tip-tilt-piston (TTP) scanning micromirror actuated by an array of folded piezoelectric unimorph actuators. The micromirror can perform rotational scanning around two in-plane orthogonal axes as well as out-of-plane piston motion The measured resonant frequencies are 112Hz (piston), 346Hz (along x-axis rotation), 1.38kHz (along y-axis rotation) and 4.87kHz (torsional rotation), respectively. The chip size is 4.3mm×2.5mm and the mirror plate is 1.0mm×1.5mm.

AB - This paper presents the design, fabrication and characterization of a novel tip-tilt-piston (TTP) scanning micromirror actuated by an array of folded piezoelectric unimorph actuators. The micromirror can perform rotational scanning around two in-plane orthogonal axes as well as out-of-plane piston motion The measured resonant frequencies are 112Hz (piston), 346Hz (along x-axis rotation), 1.38kHz (along y-axis rotation) and 4.87kHz (torsional rotation), respectively. The chip size is 4.3mm×2.5mm and the mirror plate is 1.0mm×1.5mm.

KW - MEMS

KW - Micromirror

KW - PZT

KW - PZT Actuators

KW - Piezoelectric

KW - Resonance Scanning

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DO - 10.1109/Transducers.2013.6626819

M3 - Conference contribution

AN - SCOPUS:84891713143

SN - 9781467359818

T3 - 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013

SP - 526

EP - 529

BT - 2013 Transducers and Eurosensors XXVII

T2 - 2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013

Y2 - 16 June 2013 through 20 June 2013

ER -

Liao W, Liu W, Rogers JE, Tang Y, Wang BP, Xie H. A tip-tilt-piston piezoelectric scanning micromirror with folded PZT unimorph actuators. In 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013. 2013. p. 526-529. 6626819. (2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013). doi: 10.1109/Transducers.2013.6626819

A tip-tilt-piston piezoelectric scanning micromirror with folded PZT unimorph actuators

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