A tip-tilt-piston micromirror with symmetrical lateral-shift-free piezoelectric actuators

Wenjun Liao; Wenjing Liu; Yiping Zhu; Yongming Tang; Baoping Wang; Huikai Xie

doi:10.1109/JSEN.2013.2264932

A tip-tilt-piston micromirror with symmetrical lateral-shift-free piezoelectric actuators

Wenjun Liao, Wenjing Liu, Yiping Zhu, Yongming Tang, Baoping Wang, Huikai Xie

Research output: Contribution to journal › Article › peer-review

23 Citations (Scopus)

Abstract

In this paper, we present the design, fabrication, and characterization of a high-fill-factor tip-tilt-piston micromirror actuated by four symmetrical lateral-shift-free (LSF) piezoelectric actuators. Lead zirconate titanate (PZT) is the piezoelectric material deposited using a sol-gel process. The micromirror can operate in both piston and rotation modes. At the piston mode, the measured resonant frequency is 990 Hz. An 18.3-μm piston displacement is obtained by applying 5 V_dc to four symmetrical LSF (SLSF) actuators. For the rotation mode, the measured resonant frequency is 1650 Hz and an optical deflection angle of 4.2eg; is measured by applying 5 V_dc to one SLSF actuator. A 2-D resonant scanning pattern is achieved when the PZT micromirror is applied with a 3 V_pp sinusoidal voltage at the resonance frequency.

Original language	English
Article number	6522478
Pages (from-to)	2873-2881
Number of pages	9
Journal	IEEE Sensors Journal
Volume	13
Issue number	8
DOIs	https://doi.org/10.1109/JSEN.2013.2264932
Publication status	Published - 2013
Externally published	Yes

Keywords

Micromirror
lead zirconate titanate (PZT)
piezoelectric actuators
tip-tilt-piston micromirror

Access to Document

10.1109/JSEN.2013.2264932

Cite this

@article{610402185e974fab84c8350d1e3bf5df,

title = "A tip-tilt-piston micromirror with symmetrical lateral-shift-free piezoelectric actuators",

abstract = "In this paper, we present the design, fabrication, and characterization of a high-fill-factor tip-tilt-piston micromirror actuated by four symmetrical lateral-shift-free (LSF) piezoelectric actuators. Lead zirconate titanate (PZT) is the piezoelectric material deposited using a sol-gel process. The micromirror can operate in both piston and rotation modes. At the piston mode, the measured resonant frequency is 990 Hz. An 18.3-μm piston displacement is obtained by applying 5 Vdc to four symmetrical LSF (SLSF) actuators. For the rotation mode, the measured resonant frequency is 1650 Hz and an optical deflection angle of 4.2eg; is measured by applying 5 Vdc to one SLSF actuator. A 2-D resonant scanning pattern is achieved when the PZT micromirror is applied with a 3 Vpp sinusoidal voltage at the resonance frequency.",

keywords = "Micromirror, lead zirconate titanate (PZT), piezoelectric actuators, tip-tilt-piston micromirror",

author = "Wenjun Liao and Wenjing Liu and Yiping Zhu and Yongming Tang and Baoping Wang and Huikai Xie",

year = "2013",

doi = "10.1109/JSEN.2013.2264932",

language = "English",

volume = "13",

pages = "2873--2881",

journal = "IEEE Sensors Journal",

issn = "1530-437X",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

number = "8",

}

TY - JOUR

T1 - A tip-tilt-piston micromirror with symmetrical lateral-shift-free piezoelectric actuators

AU - Liao, Wenjun

AU - Liu, Wenjing

AU - Zhu, Yiping

AU - Tang, Yongming

AU - Wang, Baoping

AU - Xie, Huikai

PY - 2013

Y1 - 2013

N2 - In this paper, we present the design, fabrication, and characterization of a high-fill-factor tip-tilt-piston micromirror actuated by four symmetrical lateral-shift-free (LSF) piezoelectric actuators. Lead zirconate titanate (PZT) is the piezoelectric material deposited using a sol-gel process. The micromirror can operate in both piston and rotation modes. At the piston mode, the measured resonant frequency is 990 Hz. An 18.3-μm piston displacement is obtained by applying 5 Vdc to four symmetrical LSF (SLSF) actuators. For the rotation mode, the measured resonant frequency is 1650 Hz and an optical deflection angle of 4.2eg; is measured by applying 5 Vdc to one SLSF actuator. A 2-D resonant scanning pattern is achieved when the PZT micromirror is applied with a 3 Vpp sinusoidal voltage at the resonance frequency.

AB - In this paper, we present the design, fabrication, and characterization of a high-fill-factor tip-tilt-piston micromirror actuated by four symmetrical lateral-shift-free (LSF) piezoelectric actuators. Lead zirconate titanate (PZT) is the piezoelectric material deposited using a sol-gel process. The micromirror can operate in both piston and rotation modes. At the piston mode, the measured resonant frequency is 990 Hz. An 18.3-μm piston displacement is obtained by applying 5 Vdc to four symmetrical LSF (SLSF) actuators. For the rotation mode, the measured resonant frequency is 1650 Hz and an optical deflection angle of 4.2eg; is measured by applying 5 Vdc to one SLSF actuator. A 2-D resonant scanning pattern is achieved when the PZT micromirror is applied with a 3 Vpp sinusoidal voltage at the resonance frequency.

KW - Micromirror

KW - lead zirconate titanate (PZT)

KW - piezoelectric actuators

KW - tip-tilt-piston micromirror

UR - http://www.scopus.com/inward/record.url?scp=84880406849&partnerID=8YFLogxK

U2 - 10.1109/JSEN.2013.2264932

DO - 10.1109/JSEN.2013.2264932

M3 - Article

AN - SCOPUS:84880406849

SN - 1530-437X

VL - 13

SP - 2873

EP - 2881

JO - IEEE Sensors Journal

JF - IEEE Sensors Journal

IS - 8

M1 - 6522478

ER -

A tip-tilt-piston micromirror with symmetrical lateral-shift-free piezoelectric actuators

Abstract

Keywords

Access to Document

Other files and links

Fingerprint

Cite this