A studyon the convection coefficient of an electro-thermal bimorph actuator

Junwen Liu; Dacheng Xu; Qiao Chen; Jinling Ding; Huikai Xie

doi:10.3969/j.issn.1004-1699.2015.08.004

A studyon the convection coefficient of an electro-thermal bimorph actuator

Junwen Liu, Dacheng Xu^*, Qiao Chen, Jinling Ding, Huikai Xie

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

Abstract

A method of estimating the convection coefficient at microscale is presented in this paper, based on the modeling and experimental data of a microfabricated electrothermal bimorph actuator. In this method, an analytical heat transfer model of the electro-thermal bimorph actuator is established first. Then the model is used to analyze the temperature distribution and extract the convection coefficient from measurement data. The convection coefficient obtained by this method matches the experimental result within 8.1%, which validates the rationality of this method.

Original language	English
Pages (from-to)	1120-1124
Number of pages	5
Journal	Chinese Journal of Sensors and Actuators
Volume	28
Issue number	8
DOIs	https://doi.org/10.3969/j.issn.1004-1699.2015.08.004
Publication status	Published - 1 Aug 2015
Externally published	Yes

Keywords

Convection coefficient
Electro-thermal Bimorph
Micro-actuator
Thermal resistance model

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10.3969/j.issn.1004-1699.2015.08.004

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abstract = "A method of estimating the convection coefficient at microscale is presented in this paper, based on the modeling and experimental data of a microfabricated electrothermal bimorph actuator. In this method, an analytical heat transfer model of the electro-thermal bimorph actuator is established first. Then the model is used to analyze the temperature distribution and extract the convection coefficient from measurement data. The convection coefficient obtained by this method matches the experimental result within 8.1%, which validates the rationality of this method.",

keywords = "Convection coefficient, Electro-thermal Bimorph, Micro-actuator, Thermal resistance model",

author = "Junwen Liu and Dacheng Xu and Qiao Chen and Jinling Ding and Huikai Xie",

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T1 - A studyon the convection coefficient of an electro-thermal bimorph actuator

AU - Liu, Junwen

AU - Xu, Dacheng

AU - Chen, Qiao

AU - Ding, Jinling

AU - Xie, Huikai

PY - 2015/8/1

Y1 - 2015/8/1

N2 - A method of estimating the convection coefficient at microscale is presented in this paper, based on the modeling and experimental data of a microfabricated electrothermal bimorph actuator. In this method, an analytical heat transfer model of the electro-thermal bimorph actuator is established first. Then the model is used to analyze the temperature distribution and extract the convection coefficient from measurement data. The convection coefficient obtained by this method matches the experimental result within 8.1%, which validates the rationality of this method.

AB - A method of estimating the convection coefficient at microscale is presented in this paper, based on the modeling and experimental data of a microfabricated electrothermal bimorph actuator. In this method, an analytical heat transfer model of the electro-thermal bimorph actuator is established first. Then the model is used to analyze the temperature distribution and extract the convection coefficient from measurement data. The convection coefficient obtained by this method matches the experimental result within 8.1%, which validates the rationality of this method.

KW - Convection coefficient

KW - Electro-thermal Bimorph

KW - Micro-actuator

KW - Thermal resistance model

UR - http://www.scopus.com/inward/record.url?scp=84946027967&partnerID=8YFLogxK

U2 - 10.3969/j.issn.1004-1699.2015.08.004

DO - 10.3969/j.issn.1004-1699.2015.08.004

M3 - Article

AN - SCOPUS:84946027967

SN - 1004-1699

VL - 28

SP - 1120

EP - 1124

JO - Chinese Journal of Sensors and Actuators

JF - Chinese Journal of Sensors and Actuators

IS - 8

ER -

A studyon the convection coefficient of an electro-thermal bimorph actuator

Abstract

Keywords

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