A SCS CMOS micromirror for optical coherence tomographic imaging

Huikai Xie; Yingtian Pan; Gary K. Fedder

A SCS CMOS micromirror for optical coherence tomographic imaging

Huikai Xie^*, Yingtian Pan, Gary K. Fedder

^*Corresponding author for this work

Carnegie Mellon University

Research output: Contribution to conference › Paper › peer-review

32 Citations (Scopus)

Abstract

This paper reports a single-crystalline silicon (SCS) micromirror used for laser beam scanning in an endoscopic optical coherence tomography (OCT) system. The micromirror is fabricated by using a deep reactive-ion-etch (DRIE) post-CMOS micromachining process. Thin bimorph actuation structures and movable bulk silicon structures are simultaneously achieved. The micromirror is 1 mm by 1 mm in size, coated with aluminum, and thermally actuated by an integrated polysilicon heater. The radius of curvature of the mirror surface is 50 cm. The mirror rotates 17° when a 15 mA current is applied. Cross-sectional images of 500×1000 pixels covering an area of 2.9 mm by 2.8 mm are acquired at 5 frames/s by using an OCT system based on this micromirror.

Original language	English
Pages	495-498
Number of pages	4
Publication status	Published - 2002
Externally published	Yes
Event	15th IEEE International Conference on Micro Electro Mechanical Systems MEMS 2002 - Las Vegas, NV, United States Duration: 20 Jan 2002 → 24 Jan 2002

Conference

Conference	15th IEEE International Conference on Micro Electro Mechanical Systems MEMS 2002
Country/Territory	United States
City	Las Vegas, NV
Period	20/01/02 → 24/01/02

Cite this

@conference{9b5cd0d7b0254e72a1facf1f416c36f1,

title = "A SCS CMOS micromirror for optical coherence tomographic imaging",

abstract = "This paper reports a single-crystalline silicon (SCS) micromirror used for laser beam scanning in an endoscopic optical coherence tomography (OCT) system. The micromirror is fabricated by using a deep reactive-ion-etch (DRIE) post-CMOS micromachining process. Thin bimorph actuation structures and movable bulk silicon structures are simultaneously achieved. The micromirror is 1 mm by 1 mm in size, coated with aluminum, and thermally actuated by an integrated polysilicon heater. The radius of curvature of the mirror surface is 50 cm. The mirror rotates 17° when a 15 mA current is applied. Cross-sectional images of 500×1000 pixels covering an area of 2.9 mm by 2.8 mm are acquired at 5 frames/s by using an OCT system based on this micromirror.",

author = "Huikai Xie and Yingtian Pan and Fedder, {Gary K.}",

year = "2002",

language = "English",

pages = "495--498",

note = "15th IEEE International Conference on Micro Electro Mechanical Systems MEMS 2002 ; Conference date: 20-01-2002 Through 24-01-2002",

}

TY - CONF

T1 - A SCS CMOS micromirror for optical coherence tomographic imaging

AU - Xie, Huikai

AU - Pan, Yingtian

AU - Fedder, Gary K.

PY - 2002

Y1 - 2002

N2 - This paper reports a single-crystalline silicon (SCS) micromirror used for laser beam scanning in an endoscopic optical coherence tomography (OCT) system. The micromirror is fabricated by using a deep reactive-ion-etch (DRIE) post-CMOS micromachining process. Thin bimorph actuation structures and movable bulk silicon structures are simultaneously achieved. The micromirror is 1 mm by 1 mm in size, coated with aluminum, and thermally actuated by an integrated polysilicon heater. The radius of curvature of the mirror surface is 50 cm. The mirror rotates 17° when a 15 mA current is applied. Cross-sectional images of 500×1000 pixels covering an area of 2.9 mm by 2.8 mm are acquired at 5 frames/s by using an OCT system based on this micromirror.

AB - This paper reports a single-crystalline silicon (SCS) micromirror used for laser beam scanning in an endoscopic optical coherence tomography (OCT) system. The micromirror is fabricated by using a deep reactive-ion-etch (DRIE) post-CMOS micromachining process. Thin bimorph actuation structures and movable bulk silicon structures are simultaneously achieved. The micromirror is 1 mm by 1 mm in size, coated with aluminum, and thermally actuated by an integrated polysilicon heater. The radius of curvature of the mirror surface is 50 cm. The mirror rotates 17° when a 15 mA current is applied. Cross-sectional images of 500×1000 pixels covering an area of 2.9 mm by 2.8 mm are acquired at 5 frames/s by using an OCT system based on this micromirror.

UR - http://www.scopus.com/inward/record.url?scp=0036122190&partnerID=8YFLogxK

M3 - Paper

AN - SCOPUS:0036122190

SP - 495

EP - 498

T2 - 15th IEEE International Conference on Micro Electro Mechanical Systems MEMS 2002

Y2 - 20 January 2002 through 24 January 2002

ER -

A SCS CMOS micromirror for optical coherence tomographic imaging

Abstract

Conference

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