A Robust Infrared Transducer beyond 2K ×2K Pixels

Defang Li; Jinying Zhang; Qingfeng Shi; Qifeng Li; Dongdong Zhao; Zhuo Li

doi:10.1109/MEMS51782.2021.9375413

A Robust Infrared Transducer beyond 2K ×2K Pixels

Defang Li, Jinying Zhang, Qingfeng Shi, Qifeng Li, Dongdong Zhao, Zhuo Li

School of Optics and Photonics

Beijing Institute of Technology

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

2 Citations (Scopus)

Abstract

A robust MEMS infrared thin film transducer beyond 2000 ×2000 pixels was proposed and fabricated for the first time. This novel transducer had excellent mechanical stability, time response and state-of-the-art pixel scale. The simulation and measured results of the transient temperature and radiation intensity were well consistent. High resolution infrared image was generated using the robust transducer. These results proved that the robust transducer is promising in infrared image generation of high frame rate, high resolution, and especially in large scale of pixels.

Original language	English
Title of host publication	34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	923-926
Number of pages	4
ISBN (Electronic)	9781665419123
DOIs	https://doi.org/10.1109/MEMS51782.2021.9375413
Publication status	Published - 25 Jan 2021
Event	34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021 - Virtual, Gainesville, United States Duration: 25 Jan 2021 → 29 Jan 2021

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume	2021-January
ISSN (Print)	1084-6999

Conference

Conference	34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021
Country/Territory	United States
City	Virtual, Gainesville
Period	25/01/21 → 29/01/21

Keywords

Infrared transducer
infrared image generation
silicon micro cavities
ultra-large scale array

Access to Document

10.1109/MEMS51782.2021.9375413

Cite this

Li, D., Zhang, J., Shi, Q., Li, Q., Zhao, D., & Li, Z. (2021). A Robust Infrared Transducer beyond 2K ×2K Pixels. In 34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021 (pp. 923-926). Article 9375413 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2021-January). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMS51782.2021.9375413

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title = "A Robust Infrared Transducer beyond 2K ×2K Pixels",

abstract = "A robust MEMS infrared thin film transducer beyond 2000 ×2000 pixels was proposed and fabricated for the first time. This novel transducer had excellent mechanical stability, time response and state-of-the-art pixel scale. The simulation and measured results of the transient temperature and radiation intensity were well consistent. High resolution infrared image was generated using the robust transducer. These results proved that the robust transducer is promising in infrared image generation of high frame rate, high resolution, and especially in large scale of pixels.",

keywords = "Infrared transducer, infrared image generation, silicon micro cavities, ultra-large scale array",

author = "Defang Li and Jinying Zhang and Qingfeng Shi and Qifeng Li and Dongdong Zhao and Zhuo Li",

note = "Publisher Copyright: {\textcopyright} 2021 IEEE.; 34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021 ; Conference date: 25-01-2021 Through 29-01-2021",

year = "2021",

month = jan,

day = "25",

doi = "10.1109/MEMS51782.2021.9375413",

language = "English",

series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

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booktitle = "34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021",

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Li, D, Zhang, J, Shi, Q, Li, Q, Zhao, D & Li, Z 2021, A Robust Infrared Transducer beyond 2K ×2K Pixels. in 34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021., 9375413, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), vol. 2021-January, Institute of Electrical and Electronics Engineers Inc., pp. 923-926, 34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021, Virtual, Gainesville, United States, 25/01/21. https://doi.org/10.1109/MEMS51782.2021.9375413

A Robust Infrared Transducer beyond 2K ×2K Pixels. / Li, Defang; Zhang, Jinying; Shi, Qingfeng et al.
34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021. Institute of Electrical and Electronics Engineers Inc., 2021. p. 923-926 9375413 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2021-January).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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T1 - A Robust Infrared Transducer beyond 2K ×2K Pixels

AU - Li, Defang

AU - Zhang, Jinying

AU - Shi, Qingfeng

AU - Li, Qifeng

AU - Zhao, Dongdong

AU - Li, Zhuo

PY - 2021/1/25

Y1 - 2021/1/25

N2 - A robust MEMS infrared thin film transducer beyond 2000 ×2000 pixels was proposed and fabricated for the first time. This novel transducer had excellent mechanical stability, time response and state-of-the-art pixel scale. The simulation and measured results of the transient temperature and radiation intensity were well consistent. High resolution infrared image was generated using the robust transducer. These results proved that the robust transducer is promising in infrared image generation of high frame rate, high resolution, and especially in large scale of pixels.

AB - A robust MEMS infrared thin film transducer beyond 2000 ×2000 pixels was proposed and fabricated for the first time. This novel transducer had excellent mechanical stability, time response and state-of-the-art pixel scale. The simulation and measured results of the transient temperature and radiation intensity were well consistent. High resolution infrared image was generated using the robust transducer. These results proved that the robust transducer is promising in infrared image generation of high frame rate, high resolution, and especially in large scale of pixels.

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KW - infrared image generation

KW - silicon micro cavities

KW - ultra-large scale array

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DO - 10.1109/MEMS51782.2021.9375413

M3 - Conference contribution

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T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

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PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021

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ER -

Li D, Zhang J, Shi Q, Li Q, Zhao D, Li Z. A Robust Infrared Transducer beyond 2K ×2K Pixels. In 34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021. Institute of Electrical and Electronics Engineers Inc. 2021. p. 923-926. 9375413. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMS51782.2021.9375413

A Robust Infrared Transducer beyond 2K ×2K Pixels

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Keywords

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